coherant Excimer ProductGuide2011

Excimer Lasers · UV Optical Systems

Product Catalog

2011

Superior Reliability & Performance

A Full Line of Excimer Lasers

As the world’s largest laser manufacturer and the leader in excimer technology, wemanufacture and ship more excimer lasersthan all other laser companies combined.We’re also the only laser company that makes virtually every other commercially available type of pulsed and continuous-waveultraviolet laser.

We have applications labs on three continentswith each lab fully equipped for UV studies.We’ll also share our 40-plus years of UV experience with you. So, whatever your UVlaser application is, you’ll get the best solutionwhen you work with Coherent.

Cover: Excimer Lasers for Flat Panel Display Production

Coherent offers the following advantages:

• UV technology leader

• Professional applications laboratory facilities worldwide

• High power and high pulse energy

• High repetition rate

• Extremely compact light sources

• OEM integration and custom performance parameters

• Beam management systems

• Superior customer-focused service and support

UV Optical SystemsExcimer Lasers

2Superior Reliability & Performance • www.Coherent.com • [email protected]

3

Laser Selection Guide 4-5

Applications Matrix 6-9

Applications Labs Worldwide 10

Excimer Lasers

ExciStar XS 12-13

Xantos XS 14-15

BraggStar Industrial Series 16-19

IndyStar 18-19

COMPexPro 20-21

LPXpro Series 22-23

LEAP 24-25

LAMBDA SX 26-31

VYPER 32-33

On-Site Requirements 34-35

UV Optical Systems and Components 36

LineBeam 37-38

VarioLas Family 39-40

GeoLasPro 41-42

5X Optical Subsystems 43

CrystaLas 44

Components 45-47

Service 48-49

Laser Measurement and Control Accessories 50-51

Contents

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Wavelength (nm) Max. Energy (mJ) Max. Repetition Rate (Hz)

ExciStar XS1 157 1 200/500193 5 200/500248 8 200/500351 4 200/500

Xantos XS1 157 1 500193 5 500248 8 500351 4 500

BraggStar Industrial Series1 193 7 1000248 11 1000

IndyStar 1 193 8 1000193 4 2000248 12 1000248 6 2000

COMPexProCOMPexPro 50 193 100 50

248 150 50

COMPexPro 100 193 200 20/100248 400 20/100308 250 20/100351 200 20/100

COMPexPro 200 193 400 10/50248 700 10/50307 500 10/50351 300 10/50

Laser Selection GuideExcimer Lasers

1 Max. energy (mJ) is stabilized energy.

4

Laser Selection Guide

Superior Reliability & Performance • www.Coherent.com • [email protected]

Wavelength (nm) Max. Energy (mJ) Max. Repetition Rate (Hz)

LPXpro Series

LPFpro 200 157 50 200

LPXpro 210 193 300 100248 700 100308 450 100351 200 100

LPXpro 220 193 250 200248 400 200308 275 200351 130 200

LPXpro 240 193 80 300248 160 400308 - 400351 55 400

LPXpro 305 193 400 50248 800 50308 600 50351 300 50

LEAP

LEAP 130K 248 650 200

LEAP 130C 308 650 200

LAMBDA SX

LAMBDA SX C-Series 308 900/1000 300/600

LAMBDA SX K-Series 248 1000 300

LAMBDA SX C-Series FOR ELA 308 1000 500

VYPER

VYPER 308 2000 600

Laser Selection GuideExcimer Lasers

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Laser S

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n Guide

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Applications Matrix1

ExciStar XS

Xantos XS

BraggStar Industrial

Series

IndyStar

COMPexPro

LEAP

LAMBDA SX

LPXPro Series

61 This matrix shows only a sampling of many possible applications for our lasers. Please contact us regarding your application.

Applications


VYPER

Marking

High-Speed Cable Marking • • •

Eyeglass Marking • • • • •

Teflon Marking • • • • • •

Diamond and Jewel Marking • •

Material Processing

Inkjet Nozzle Drilling • • • •

Diamond and Sapphire Drilling • • • •

FBG Writing • • • •

Transparent Conductive Oxides Structuring (TCO, microfluidic) • • •

Laser Lift-Off (LLO) • • • • •

Surface Treatment

Excimer Laser Annealing (ELA/SLS) • •

Cylinder Honing • •

Pulsed Laser Deposition (PLD) • • • • •

Laser Direct Synthesis (LDS) • • •

Laser Direct Patterning (LDP) • • • •

Laser-Induced Transfer Imaging (LITI) • • • • •

Ion Implantation/Doping/Implant Activation • • • • •

Cleaning • • • • • •

Gas-Assisted Laser Etching (GALE) • • • • • •

Measurement

Combustion Analysis • • •

Optics/Coating Testing • • •

Mask Inspection •

Spectroscopy • • • • •

Laser-Induced Fluorescence (LIF) • • • • •

Medical Procedures

Psoriasis/Vitiligo Treatment • •

Refractive Eye Surgery (LASIK*) • • •

7

Applications

ApplicationsExamples

Glass Marking (courtesy of Carl Zeiss Vision)

Laser Model ExciStar XS

Cylinder Honing (courtesy of Audi AG)

Laser Model LAMBDA SX

Advanced Wafer Marking (courtesy of Innolas)

Laser Model IndyStar

Laser Direct Patterning of Circuits (courtesy of LPKF)

Laser Model LAMBDA SX

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8

Applications

Laser CVD and PLD generated thin films on various base material wafers

Laser Model CompexPro, LPXPro, LEAP, LAMBDA-SX

Laser doping phosphorous silicate glass (PSG) solar cell after irradiation with single pulses

Laser Model LPXpro, LEAP, LAMBDA-SX


9

Applications


Frontside ablation of SiNx for structuring and etch barrier removal on c-Si solar sells

Laser Model LPXpro, LEAP, LAMBDA-SX

Thin film ablation on Si wafer. Insert showing close-up, giving an idea on the depth control reachable.

Laser Model IndyStar, CompexPro, LPXpro, LEAP

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Excimer Laser Applications

10

Applications

Excimer Laser Advantages

ExcimerLaser


Flow feature for ink and inkjet nozzle hole machined in polyimide foilc-Si surface after excimer drilling of SiNx etch barrier

and subsequent etching for PV applications

Row of nozzle holes in polyimide foil for inkjet printers ELA x-tallised LTPS film after secco etch (courtesy JSW) Marking of polymer (PET, PE, PP, PTFE etc.) tubings

UV WavelengthDirectly GeneratedImposing HighResolution on Large Areas

Low Coherence

High Pulse Energy

Stable BeamProperties overOperation Range

Flexible Repetition Rate

Laser Pulseson Demand

11

Applications Labs Worldwide

Our laser applications labs provide state-of-the-art feasibility testing of material processing methods. Please contact yourCoherent representative or Coherent sales office for more information. For contact information, please go to page 50.

Application Lab, Goettingen

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Applications

Excimer Laser Application Lab Locations

12

Excimer Lasers

2. Key Features and Customer Benefits

Key Features Customer Benefits

Ultra-Compact • Low investment costsLightweight Design • Flexible integration

Almeta XS Tube Design • Extended tube lifetime• High pulse-to-pulse stability• Available at 157, 193, 248 and 351 nmwavelengths

Corona Preionization • Homogeneous beam profile

Solid-State Switch • Immediate operation• Maintenance-free operation

Energy Monitor • Preset stabilized energy operation

1. Description

ExciStar XS excimer lasers are tabletop systems with an ultra-compact design for easy installation and operation. Due to the integration of the new Almeta XS tube design,they deliver excellent results in low pulse energy applications.

Featuring soft corona preionization, the ExciStar XS provides ahomogeneous energy distribution and high pulse-to-pulsestability. Solid-state switching provides immediate and main-tenance-free operation, and units are available with maxi-mum repetition rates of 200 Hz and 500 Hz.

ExciStar XSExcimer Lasers

3. Specifications

Wavelength (nm) 157 193 248 351

Max. Repetition Rate (Hz) 200/500 200/500 200/500 200/500

Max. Pulse Energy (mJ) 2 8 12 5

Stabilized Pulse Energy (mJ) 1 5 8 4

Average Pulse Power1 0.2/0.5 1/2.5 1.6/4 0.8/2

Energy Stability1 (sigma, %) 2/3 2/3 2/3 2/3

Beam Dimensions (FWHM, V x H, mm2) 6 x 3 6 x 3 6 x 3 6 x 3

Beam Divergence (FWHM, V x H, mrad2) 3 x 1.5 3 x 1.5 3 x 1.5 3 x 1.5

Pulse Duration (ns)(typ.) 5 5 5 51 Measured at stabilized energy and maximum repetition rate (200/500 Hz).


Specifications (continued)

Wavelength (nm) 157 193 248 351

Part No. (200 Hz) EXS-200-157 nm-XS EXS-200-193 nm-XS EXS-200-248 nm-XS EXS-200-351 nm-XS 1115882 1115880 1115885 1157175

Part No. (500 Hz) EXS-500-157 nm-XS EXS-500-193 nm-XS EXS-500-248 nm-XS EXS-500-351 nm-XS 1124412 1124414 1124416 1148001

4. Weight/Utilities/Dimensions

Weight 58 kg/128 lbs.

Cooling Air-cooled

Electrical 230V, 50 or 60 Hz, 2000 VAC, 16A (recommended external fuse),single-phase

Dimensions 649 x 300 x 400 mm (L x W x H) (25.6 x 11.8 x 15.7 in.)

ExciStar XSExcimer Lasers

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Excimer Lasers



Gas Management • Equipped with a complete gas management system, including premix gas cylinder• No additional external gas compartment necessary

• Compliant with GermanTÜV safety standards

Almeta XS Tube Design • Extended tube lifetime• High pulse-to-pulse stability• Available at 157, 193, 248 and 351 nm wavelengths


Solid-State Switch • Immediate operation• Maintenance-free operation

Energy Monitor • Preset stabilized energy operation

1. Description

Xantos XS excimer lasers are compact, fully integrated systemsthat are very easy to install. For ease of use in the lab, theXantos XS housing contains a complete laser module based onthe ExciStar XS, plus a pre-mixed gas cylinder that includes gashandling and complies with all necessary gas safety standards.Xantos XS lasers are best suited for low pulse energy applica-tions, such as spectroscopy and precision material processing.

Featuring soft corona preionization, the Xantos XS provides a homogeneous energy distribution and high pulse-to-pulsestability. Solid-state switching ensures immediate, mainte-nance-free operation. Xantos XS lasers are available for maximum repetition rates of 500 Hz, and standard versions are equipped with an energy monitor, as well as an electro-mechanical shutter.

Xantos XSExcimer Lasers

3. Specifications

Wavelength (nm) 157 193 248 351

Max. Repetition Rate (Hz) 500 500 500 500

Max. Pulse Energy (mJ) 2 8 12 5


Average Pulse Power1 (W) 0.5 2.5 4 2

Energy Stability1 (sigma, %) 3 3 3 3



Pulse Duration (typ.) 5 5 5 51 Measured at stabilized energy and maximum repetition rate.


5. Accessories

No accessories available.


Weight 170 kg/374.8 lbs.

Cooling Air-cooled

Electrical 230V, 50 to 60 Hz, 2000 VAC,16A (recommended external fuse), single-phase


[including signal lamp]

Xantos XSExcimer Lasers

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Wavelength (nm) 157 193 248 351

Part No. Xantos XS-500- Xantos XS-500- Xantos XS-500- Xantos XS-500-(always includes energy monitor 157 nm 193 nm 248 nm 351 nmand electromechanical shutter) 1123361 1123362 1123363 1123364

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Excimer Lasers



Industrial Design • High uptime• Low maintenance

FutureTube • Metal/ceramic tube design for extended lifetimes

Corona Preionization • Homogenous beam profile

Solid-State Pulser • "Soft" discharge for better pointing stability and energy stability

• Especially suitable forFBG Writing

Air-Cooled • Quick and easy integration(water-cooled optional) • Optional external heat

exchanger for water cooling at high repetition rates

1. Description

The BraggStar Industrial Series is a versatile UV light sourcethat delivers excellent performance for all types of:• Phase Mask Fiber Bragg Grating (FBG) Writing• High Spatial Coherence Applications

The BraggStar S-Industrial, which is available at 193 nm and248 nm wavelengths provides repetition rates up to 1000 Hz.It also features the FutureTube design, corona pre-ionizationand solid state pulser technology. Overall BraggStar lasers arecompact, highly effective systems that are easy to install andeasy to operate.

BraggStar Industrial SeriesExcimer Lasers

3. Specifications1

Wavelength (nm) 193 248

Max. Repetition Rate (Hz) 1000 1000

Max. Pulse Energy (mJ) 11 16

Stabilized Pulse Energy (mJ) 7 11

Average Pulse Power2 (W) 7 12

Energy Stability2 (sigma, %) 3 3

Beam Dimensions (FWHM, V x H, mm2) 6 x 3 6 x 3

Beam Divergence (FWHM, V x H, mrad2) 2 x 1 2 x 1

Pulse Duration (ns)(typ.) 12 15

Temporal Coherence (FWHM, µm) >30 >120

Spatial Coherence (FWHM, µm) >700 >1500


BraggStar Industrial SeriesExcimer Lasers

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3. Specifications (continued)

Spectral Bandwidth (FWHM) natural natural


Part No. BSI 1000-193 nm-FT BSI 1000-248 nm-FT(always includes energy monitor) 4-06-0022-063 4-06-0018-0641 Measured at stabilized energy and maximum repetition rate.

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5. Accessories

Part No. Product Description

3-15-0004-000 External heat exchangerKB200V — 19" version (for 50 or 60 Hz and 100, 115, 200, 208 and 230V),Cooling capacity 2.0 kW, water-to-air



Cooling Air-cooled, optionallywater-cooled by externalheat exchanger

Electrical 230V, 50 or 60 Hz, 2000 VAC,16A (recommended external fuse),single-phase or two phases


18

Excimer Lasers

IndyStarExcimer Lasers

1. Description

The IndyStar Series represents a compact laser series forapplications needing high repetition rates up to 2000 Hz and low pulse energy. Available for 193 nm and 248 nm, it combines the demanding requirements of a semi-S2-certification with an extended components lifetime.

The IndyStar from Coherent is setting new standards for components lifetime in industrial applications. Based on the Almeta-tube-technology, the IndyStar achieves lifetimesof many billion pulses, resulting in a reduction of the overallcosts of operation.

The success of a UV-laser application depends on high performance, reliability, easy process integration, safety andfast-response support from your laser supplier. Coherentknows that at the core of your business is your process deviceand its heart is the laser. The IndyStar series is engineered to meet the demands in every aspect of an industrial laser.



Industrial Design with • High uptimeSemi-S2-certificate • Low maintenance


Solid-State Pulser • "Soft" discharge for better pointing- and energy stability

• No warm-up time, maintenance- free

AlmetaTube Technology • All metal sealed tube design • Extended lifetimes for many billion pulses

Modified Electronic • Proven designConcept • “POWERLOK” function integrated

• Lowest Jitter by “TIMELOK” function

Integrated • Laser operation at presetEnergy Monitor stabilized energy

Compact Design, Single • Quick and easy integrationPhase, Advanced Service Concept

3. Specifications

Parameter ArF ArF KrF KrF

Wavelength (nm) 193 193 248 248

Max. Repetition Rate (Hz) 1000 2000 1000 2000


Stabilized Pulse Power (W) 8 8 12 12

Energy Stability (sigma, %) <2 <2 <2 <2



Pulse Duration (FWHM)(ns) 5 ±2 4 ±1 5 ±2 4 ±1

Part No. IndyStar 193 1 kHz IndyStar 193 2 kHz IndyStar 248 1 kHz IndyStar 248 2 kHz1166017 1162918 1166018 1166016


IndyStarExcimer Lasers



Cooling1 kHz-version Air-cooled; water-cooling optionally2 kHz-version Water-cooled

Electrical 230V, 50/60 Hz, 2000 VAC,16A (recommended external fuse), single or two phases

Dimensions 974 x 381 x 838 mm(L x W x H) (38.35 x 14.96 x 32.95 in.)

5. Accessories

Part No. Description

3-15-0004-000 External heat exchanger KB200V— 19" version (for 50/60 Hz and 100, 115, 200, 208 and 230V), cooling capacity 2.0 kW, water-to-air

19

Excimer La

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20

Excimer Lasers

COMPexProExcimer Lasers



Ceramic Preionization • Unmatched pulse-to-pulse stability • Increased pulse energy• Increased static gas lifetime

Integrated Vacuum Pump • Compact standalone designand Halogen Filter

Integrated, Purgable • Preset stabilized energy Energy Monitor operation

Air-Cooled (up to 20 Hz), • Quick and easy integrationSingle-Phase

1. Description

COMPexPro lasers are highly effective light sources, featuring acompact design and easy installation and operation. Theydeliver superior results in demanding applications, such assolid sampling systems (LA-ICP-MS), material research (PLD)and precise material processing.

Featuring new ceramic preionization, the COMPexPro pro-vides multi-hundred millijoules output, plus unmatchedpulse-to-pulse stability. The COMPexPro also comes with animproved gas processor that extends both gas and opticslifetimes.

3. Specifications

Wavelength COMPexPro COMPexPro COMPexPro COMPexPro COMPexPro(nm) 50 102 110 201 205

Maximum Pulse Energy1 (mJ) 193 100 200 200 400 400248 150 400 400 700 700308 - 250 250 500 500351 - 200 200 300 300

Maximum Average Power2 (W) 193 4 4 12 4 15248 7 7 30 7 30308 - 5 16 4 20351 - 4 12 3 15

Maximum Repetition Rate (Hz) All 50 20 100 10 50

Pulse Duration (FWHM)(ns) All 20 20 20 25 25

Energy Stability (sigma, %) All 1 1 1 1 1

Beam Dimensions (FWHM, V x H, mm2) All 14 x 5 24 x 10 24 x 10 24 x 10 24 x 10

Beam Divergence (FWHM, V x H, mrad2) All 2 x 1 3 x 1 3 x 1 3 x 1 3 x 11 Measured at 10 Hz.2 Measured at maximum repetition rate.


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COMPexProExcimer Lasers


WeightCOMPexPro 50/100 270 kg/591 lbs.COMPexPro 200 325 kg/716 lbs.

Cooling Water, 2 to 3 l/min. (0.5 to 0.8 gal./min.), 15 to 20°C

Electrical

COMPexPro 50/100 230V, ±10%, 16A, 50/60 Hz switchable, 1-phase

COMPexPro 200 115V, ± 10%, 25A, 50/60 Hz switchable, 1-phase

Dimensions (L x W x H)COMPexPro 50/100 1282 x 375 x 793 mm

(51 x 15 x 31 in.)COMPexPro 200 1682 x 375 x 793 mm

(67 x 15 x 31 in.)

5. Accessories


26082610 Unstable resonator optics 193 nm(COMPexPro 50 and 100)

26082710 Unstable resonator optics 248 nm(COMPexPro 50 and 100)

26082810 Unstable resonator optics 308 nm(COMPexPro 100)




262456 Unstable resonator adapter(COMPexPro 50, 100 and 200)

1149339 Beam aligner

1132990 Temperature stabilization module


Wavelength COMPexPro COMPexPro COMPexPro COMPexPro COMPexPro(nm) 50 102 110 201 205

Part No. (F-Version) All 1124409 1113836 1113838 1115129 1115131

Part No. (XeCl-Version) All - 1113837 1113839 1115130 1115132

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Excimer Lasers

LPXproExcimer Lasers



Adaptable Resonator • Fit to application requirementsConfigurationFlexible Pulse Energy • Advanced process control

F-version • 193, 248, 351 nm operationC-version • 308 nm operation

True Specs • Reliable long-term operationInternal Burst Generator • Programmable laser pulses

Rugged Laser Frame • Unmatched beam stability

Longest Gas Life • Low operation costs

1. Description

LPXpro is a family of RoHS compliant excimer lasers, offered at wavelengths of 193, 248, 308 and 351 nm, with output powers as high as 80W at 248 nm. The LPFpro familyexpands wavelength range to vacuum UV with 157 nm. Thebeam quality, high pulse energy, short pulse length and highpeak power of LPXpro and LPFpro lasers combine to optimizeUV applications.

These characteristics, plus their proven reliability and low cost of ownership make LPXpro lasers suitable for a widerange of demanding, high precision processing tasks. Theseinclude drilling, pulsed laser deposition (PLD), laser direct patterning (LDP), laser lift off (LLO) and cleaning.

3. Specifications

Wavelength1 LPXpro LPXpro LPXpro LPXpro LPFpro LPFpro(nm) 210 220 240 305 205 220

Max. Pulse Energy (mJ) 157 – – – – 50 40up to 10 Hz 193 450 300 160 600 400 250

248 800 550 300 1100 – –308 500 300 – 700 – –351 400 200 120 400 – –

Max. Stabilized Pulse Energy (mJ) 157 – – – – – –at Full Repetition Rate 193 300 250 80 400 – –

248 700 400 160 800 – –308 450 275 – 600 – –351 200 130 55 300 – –

Max. Rep. Rate (Hz) all 100 200 300/4002 50 50 200

Max. Stabilized Average Power (W) 157 – – – – 2.53 73193 30 50 24 20 153 403248 70 80 64 40 – –308 45 55 – 30 – –351 20 26 22 15 – –

Energy Stability (at 5 Hz, 1 sigma, %) 248 <_1 <_1 <_2 <_1 <_104 <_104

Pulse Duration (ns, typ.) 248 25 20 15 25 – –


LPXproExcimer Lasers


WeightLPFpro/LPXpro 200 400 kg/880 lbs.LPXpro 305 430 kg/946 lbs.

Cooling Water, <_7 l/min. (1.8 gal./min.), 15 to 20°C

Electrical 208 or 400 VAC, 50/60 Hz 3-phase

Dimensions (L x W x H)Laser Head 1966 x 800 x 474 mm3

(77 x 32 x 19 in.3)Power Supply 460 x 185 x 750 mm3

(18 x 7 x 30 in.3)

5. Accessories


26083020 Unstable resonator optics 193 nm(external resonator configuration)




26083010 Unstable Resonator Optics 193 nm(LPXpro 240)

26083110 Unstable Resonator Optics 248 nm(LPXpro 240)

262856 Upgrade Kit VCR Gas Connections

1149339 Beam aligner

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3. Specifications (continued)

Wavelength1 LPXpro LPXpro LPXpro LPXpro LPFpro LPFpro(nm) 210 220 240 305 205 220

Avg. Beam Dimensions (V x H, FWHM, mm2, typ.) 248 12 x 24 8 x 24 8 x 22 12 x 30 10 x 244 10 x 244

Beam Divergence (V x H, FWHM, mm2, typ.) 248 <_1 x 3 <_1 x 3 <_1 x 3 <_1 x 3 <_2 x 64 <_2 x 64

Part No. (F-Version, 400V) 1120125 1120129 1152299 1120133 1120137 1120139

Part No. (F-Version, 208V) 1120126 1120130 1152300 1120134 1120138 1120140

Part No. (C-Version, 400V) 1120127 1120131 – 1120135 – –

Part No. (C-Version, 208V) 1120128 1120132 – 1120136 – – 1 157 nm with LPFpro only; 193 nm, 248 nm, and 351 nm with LPXpro F-version only; 308 nm with LPXpro C-version only.2 At 193 nm (300 Hz only).3 Max. average power at maximum high voltage. Max. stabilized power not specified for LPFpro.4 At 157 nm.

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Excimer Lasers

LEAPExcimer Lasers


1. Description

LEAP is a series of high duty-cycle excimer lasers, offered atwavelengths 248 and 308 nm, with output powers as high as130W. The beam quality, high stabilized pulse energy of 650mJ, short pulse length and high peak power of LEAP laserscombine to optimize UV manufacturing applications. Thesecharacteristics plus their reliability and economy make LEAPlasers suitable for a wide range of demanding, high-precisionprocessing tasks. These include micro drilling and structuring,laser direct patterning (LDP), and surface treatment.

2. Specifications

LEAP 130K LEAP 130C


Stabilized Pulse Energy Range (mJ) 550 to 650 550 to 650

Maximum Stabilized Average Power (W) 130 130

Maximum Repetition Rate (Hz) 200 200

Energy Stability (sigma, %) <_1.5 <_1.5

Pulse Duration (FWHM)(ns) 22 22

Average Beam Dimensions (V x H, FWHM, mm2, typ.) 35 x 12.5 35 x 12.5

Beam Divergence (V x H, FWHM, mrad) <_4.5 x 1.5 <_4.5 x 1.5

Dynamic Gas Lifetime >30 >30(at max. stabilized energy) (mio. pulses)

Part No. (200/208V) 1165692 1165693LEAP 130K Excimer Laser 248 nm; LEAP 130C Excimer Laser 308 nm;200/208V 200/208V

Part No. (400V) 1165694 1165695LEAP 130K Excimer Laser 248 nm; LEAP 130C Excimer Laser 308 nm;400V 400V

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LEAPExcimer Lasers



Cooling Water, 20 l/min. (37 gal./min.), 19 to 21°C

Electrical 8.6 kVA, 3-phase, 200/208 VAC or 400 VAC, 50/60 Hz

Dimensions (L x W x H) 2415 x 800 x 1130 mm3 (95.1 x 31.4 x 44.5 in.3)

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Excimer Lasers

LAMBDA SXExcimer Lasers

2. Key Features + Customer Benefits


Industrial Design • Rugged and reliable • Modular setup

Industrial Interfaces • Integrated industrial PC • Serial interface RS-232• Direct Control Port (DCP) for easy integration intoworkstations

External Resonator • Excellent beam-pointing stability• SlideValves for tube window maintenance

Sealed and Purged • Long optics lifetimes, suitable forBeam Path rugged industrial enviroments

High-Stability NovaTube • Outstanding energy stability —NovaPowerSwitch significantly below 1% (rms)

High UV Laser Power • Lowest costs per Watt UV

Flexible Pulse Energy • Advance process control

External Resonator • Unmatched beam stability

1. Description

The LAMBDA SX industrial excimer laser series provides highlystabilized UV power to the production floor. It is designed todeliver the best energy stability available, and also features a number of innovative technologies forunsurpassed performance and reliability.

PowerLokProprietary PowerLok technology brings every pulse of a bursttrain to the desired energy level. PowerLok employs a self-learning algorithm, utilizing a look-up table to smoothencycling bursts.

TimeLokProprietary TimeLok technology stabilizes the trigger-to-pulsedelay of all-solid-state HV switch-driven excimer lasers andminimizes the time jitter. TimeLok also employs a self-learning algorithm, utilizing a look-up table for delay stabilization in any operation mode.

Onboard Diagnostics and LoggingThe last 10,000 values of HV, energy and sigma are stored in a ring buffer and are continuously updated from pulse topulse. This enables detailed logging of laser operations.

e-DiagnosticsProvides external online data acquisition and analysis(optional). Allows tracking and analysis of laser performanceexternally on a notebook PC. Supports predicted maintenanceand process parameter control.


LAMBDA SX C-Series Excimer Lasers

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3. Specifications1

LAMBDA SX 300C LAMBDA SX 200C LAMBDA SX 540C

Wavelength (nm) 308 308 308

Stabilized Pulse Energy Range (mJ) 800 to 1000 550 to 670 700 to 900

Maximum Stabilized Average Power (W) 300 200 540

Maximum Repetition Rate (Hz) 300 300 600

Energy Stability (rms, %) <_2 <_1 <_2

Pulse Duration (FWHM)(ns) 29 22 29 ±6

Beam Dimensions (FWHM, V x H, mm2)2 35 x 13 35 x 12 35 x 13

Beam Divergence (FWHM, V x H, mrad) <_4.5 x 1.5 <_4.5 x 1.5 <_4.5 x 1.5

Dynamic Gas Lifetime >40 >40 >50(at max. stabilized energy)(mio. pulses)

Part No. 1121446 1139028 1139024LAMBDA SX 300C, LAMBDA SX 200C, LAMBDA SX 540C,400 VAC, 50/60 Hz 400 VAC, 50/60 Hz 400 VAC, 50/60 Hz

1 All specifications are subject to change without prior notice in order to provide the best product possible.2 At 1.0m from beam exit.

4. Weight/Utilities/Dimensions LAMBDA SX 300C LAMBDA SX 200C LAMBDA SX 540C

Weight 1400 kg/3086 lbs. 1370 kg/3020 lbs. 1480 kg/3263 lbs.

Cooling Water, 12 to 28 l/min. Water, 12 to 28 l/min. Water, up to 70 l/min.(3.2 to 7.4 gal./min.), (3.2 to 7.4 gal./min.), (18.5 gal./min.),10 to 15°C 10 to 15°C 12 to 15°C

Electrical 22 kVA, 3-phase, 18 kVA, 3-phase, 40 kVA, 3-phase400 VAC, 50 or 60 Hz, 400 VAC, 50 or 60 Hz, 400 VAC, 50 or 60 Hz,190 to 480 VAC 190 to 480 VAC 190 to 480 VAC(w/optional transformer) (w/optional transformer) (w/optional transformer)

Dimensions 2500 x 850 x 1925 mm 2500 x 850 x 1925 mm 2500 x 850 x 1925 mm(L x W x H) (98.5 x 33.3 x 76 in.) (98.5 x 33.3 x 76 in.) (98.5 x 33.3 x 76 in.)

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28

Excimer Lasers

LAMBDA SX C-Series for ELAExcimer Lasers

2. Key Features + Customer Benefits


Best Pulse Stability High annealing homogeneity

Flexible Pulse Energy Advanced process & cost control

Stable Beam Parameter High annealing yield

1. Description

The LAMBDA SX 315C and the LAMBDA SX 540C HPS are specially designed for Excimer Laser Annealing (ELA). The high quality demand in OLED display manufacturing requires high grade low temperature poly-Silicon (LTPS) which can be created only with high performance excimer lasers.

3. Specifications1

LAMBDA SX 315C LAMBDA SX 540C HPS


Stabilized Pulse Energy Range(mJ) 800 to 1050 800 to 1000

Maximum Stabilized Average Power (W) 315 500


Energy Stability (rms, %) <_1 <_1

Pulse Duration (FWHM)(ns) 29 ±6 29 ±6

Average Beam Dimensions (FWHM, V x H, mm2)2 35 x 13 35 x 13

Beam Divergence (FWHM, V x H, mrad) <_4.5 x 1.5 <_4.5 x 1.5

Beam-Pointing Stability (V x H) <_0.45 x 0.15 _0.45 x 0.15

Dynamic Gas Lifetime >40 >50(at max. stabilized energy)(mio. pulses)

Part No. 1139020 1170166LAMBDA SX 315C, LAMBDA SX 540C HPS,400 VAC, 50/60 Hz 400 VAC, 50/60 Hz



29

Excimer La

sers

LAMBDA SX C-Series for ELAExcimer Lasers


LAMBDA SX 315C LAMBDA SX 540C HPS

Weight 1400 kg/3086 lbs. 1480 kg/3263 lbs.

Cooling Water, 12 to 28 l/min. Water, up to 70 l/min.(3.2 to 7.4 gal./min.), 10 to 15°C (18.5 gal./min.), 12 to 15°C

Electrical 22 kVA, 3-phase, 400 VAC, 40 kVA, 3-phase, 400 VAC,50 or 60 Hz, 190 to 480 VAC 50 or 60 Hz, 190 to 480 VAC,(with optional transformer) (with optional transformer)

Dimensions (L x W x H) 2500 x 850 x 1925 mm 2500 x 850 x 1925 mm(98.5 x 33.3 x 76 in.) (98.5 x 33.3 x 76 in.)

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30

Excimer Lasers

LAMBDA SX K-SeriesExcimer Lasers


4. Weight/Utilities/Dimensions LAMBDA SX 300K LAMBDA SX 200K

Weight 1330 kg/2932 lbs. 1320 kg/2910 lbs.

Cooling Water, 12 to 25 l/min. Water, 12 to 25 l/min. (3.2 to 6.6 gal./min.), 10 to 15°C (3.2 to 6.6 gal./min.), 10 to 15°C

Electrical 19 kVA, 3-phase, 400 VAC, 17 kVA, 3-phase, 400 VAC, 50 or 60 Hz, 190 to 480 VAC 50 or 60 Hz, 190 to 480 VAC(with optional transformer) (with optional transformer)

Dimensions 2500 x 850 x 1925 mm 2500 x 850 x 1925 mm(L x W x H) (98.5 x 33.3 x 76 in.) (98.5 x 33.3 x 76 in.)

3. Specifications1

LAMBDA SX 300K LAMBDA SX 200K


Maximum Stabilized Pulse Energy (mJ) 800 to 1000 550 to 670

Maximum Stabilized Average Power1 (W) 300 200


Energy Stability (rms, %) <_2 <_2

Pulse Duration (FWHM)(ns) 34 24

Beam Dimensions (FWHM, V x H, mm2)2 36 x 16 36 x 16

Beam Divergence (FWHM, V x H, mrad) <_4.5 x 1.5 <_4.5 x 1.5

Dynamic Gas Lifetime >40 >40(at max. stabilized energy) (mio. pulses)

Part No. 11139033 1139031LAMBDA SX 300K, 400 VAC, 50/60 Hz LAMBDA SX 200K, 400 VAC, 50/60 HZ


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Excimer La

sers

LAMBDA SX Excimer Lasers

5. Accessories


1121675 e-Diagnostics tool kit, consisting ofrecording and analysis software,licensed for installation on a notebook PC

262673 Torque wrench for cavity windowassembly for 300 Hz series lasers

Halogen sensor integratedin laser exhaust

1142697 F-Series Sensor1142730 C-Series Sensor

For line voltages other than 3-phase, 400 VAC, please orderexternal transformer.

Part No. Product Description1136303 Transformer 30 kVA

300 Hz series lasers190 up to 480 VAC

1136304 Transformer 60 kVA600 Hz series lasers190 up to 480 VAC

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32

Excimer Lasers

VYPERExcimer Lasers


1. Description

The VYPER is a next generation very high power excimer laser specially designed for Excimer Laser Annealing (ELA). The high quality demand in OLED display manufacturingrequires high grade low temperature poly-Silicon (LTPS) which can be created only with high performance excimerlasers. The VYPER laser fits perfectly to the high powerLineBeam 750 optics.

2. Specifications

VYPER

Wavelength (nm) 308

Stabilized Pulse Energy Range(mJ) 1800 to 2000

Maximum Stabilized Average Power (W) 1200

Maximum Repetition Rate (Hz) 600

Energy Stability (sigma, %) <_0.5

Pulse Duration (FWHM)(ns) 29 ±6

Average Beam Dimensions (FWHM, V x H, mm2) 35 x 13

Beam Divergence (FWHM, V x H, mrad) <_4.5 x 1.5

Dynamic Gas Lifetime (at max. stabilized energy)(mio. pulses) >100

Part No. 1179155VYPER, 400 VAC 50/60 Hz

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Excimer La

sers



Cooling Water, up to 140 l/min. (37 gal./min.), 12 to 15°C

Electrical 120 kVA, 3-phase, 400 VAC,50 or 60 Hz

Dimensions 2800 x 1700 x 2085 mm(L x W x H) (110 x 66.9 x 82 in.)

4. Accessories

For line voltages other than 3-phase, 400 VAC, please orderexternal transformer. Two transformers per laser required.


1136304 Transformer 60 kVA600 Hz series lasers190 up to 480 VAC

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VYPERExcimer Lasers

34

Excimer Lasers

On-Site RequirementsExcimer Lasers

Cooling

Excimer lasers have overall efficiencies of about 2 or 3%. Most of the dissipated electrical energy of the laser dischargeis transformed into heat. Low duty cycle excimer lasers areusually air-cooled. However, at medium to high powers and ahigh duty cycle, most excimer lasers need water or externalheat exhangers for cooling. For information about individuallaser cooling requirements, please ask for detailed specifica-tions about a system.

Exhaust Ventilation

At the installation site, the laser system must be connected to an exhaust ventilation system. COMPexPro, LPXPro, LAMBDA SX, and VYPER have their own ventilation fans, which guarantee the required negative pressure. For detailedinformation about individual exhaust ventilation require-ments, please refer to the Site Preparation Manual.

Beam Path Purging

Excimer laser operation at 157 nm and 193 nm requires purgingof the beam path with nitrogen in order to avoid absorptionby ambient air.

On-site preparation is required before an excimer laser can be installed. The following is a brief overview: For detailedinformation, please refer to the Site Preparation Manual,which is available from your Coherent representative.

Power Supply

Excimer laser power requirements vary by model and can be either single-phase (115V, 50/60 Hz or 230V, 50/60 Hz) or three-phase (200/208V, 50/60 Hz or 400V, 50/60 Hz).

To determine the power requirements and wall-plug configuration for a particular model, please refer to the laserspecifications.

Gas Supply

The active medium of an excimer laser is a mixture of a raregas (argon, krypton or xenon), a halogen (fluorine or hydrogenchloride), and a buffer gas (helium or neon). In addition to thepremixed gas, another gas (in most cases, nitrogen) is neededto purge the laser beam and, for certain service procedures, aflush gas (helium) is also required. For more informationabout gas handling and installation, please refer to the sitepreparation manual.


35

Excimer La

sers

On-Site RequirementsExcimer Lasers

Air Cooling (air-to-air exchange)

External heat exchanger option (water-to-air exchange)

Xantos XS (only air-cooled)ExciStar XS (only air-cooled)IndyStarBraggStar Industrial Series

Water Cooling (water-to-water exchange)

COMPexPro >20 HzLPXpro/LPFpro/LEAPLAMBDA SX/VYPERIndyStar (optional)

Laser Gases

ExciStar XS SeriesIndyStarBraggStar Industrial SeriesCOMPexProLPXpro*(for 157/193 nm)

COMPexProLPXpro/LPFpro/LEAPLAMBDA SX/VYPER*(for 157/193 nm)

Halogen is F2/He, HCl/H2/Ne or premix(depending on wavelength and laser).

Rare is Ar, Kr, Xe or premix(depending on wavelength and laser).

Xantos XS includes a premix gas cylinderintegrated in the He device.

Xantos XS

Halogen

Rare

Ne He

He

N2*

N2*L A S E R

Power

Single-phase AC115V, 50/60 Hz

· COMPexPro

Single-phase AC230V, 50/60 Hz

· ExciStar XS· IndyStar· BraggStar Industrial Series· Xantos XS

Three-phase AC200/208V,50/60 Hz or400V, 50/60 Hz

· LPXpro/LPFpro/LEAP

Three-phase AC400V 50/60 Hz (190to 480V withtransformer)

· LAMBDA SX/VYPER

Premix

He

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36

UV O

ptical Systems

UV Optical Systems, Modules and ComponentsUV Optical Systems

Functional BlocksModular System Approach

UVoptical systems usually include a set of blocks that formthe illumination beam path and the imaging beam path. Theoptical system shapes and homogenizes the laser radiation toilluminate a mask that contains the desired pattern. Thismask, whose pattern can easily be changed, is then imagedwith a projection lens onto the substrate.

Using this technique, the MicroLas line of components pro-vides an easy way to build dedicated optical beam deliverysystems for a wide range of applications.

In addition to our optical and laser products, we also performfeasibility studies, application lab sample preparation/testing,and offer small-scale job shop opportunities to customersaround the world.

Customized Optical Systems for a wide range of R&D applications.

Laser Shutter Attenuator Telescope

Homo-genizer

Field Lens

Mask

P-Lens

Substrate

Illum

ination

Beam

Path

Imag

ing

Beam

Path


37

UV Optical Systems

LineBeamSystem for Crystallization Annealing Applications

1. Description

LineBeam for Excimer Laser Annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates has been transferred intoindustrial production in the mid 90s. This technique is pro-gressing to even longer line beams for annealing larger areas,employing new excimer lasers with more and more pulseenergy. .


Key Features

• Excellent beam profile homogeneity

• Outstanding optical lifetime performance

•Display industry proven technology, large installation base world wide

• Standard technology for silicon annealing process (LTPS-LCD, OLED)

• Flexible and adaptable for various applications (e.g. ELA, LLO, Activation)

• Perfect match with LAMBDA SX and LEAP excimer lasers

3. Specifications

LineBeam LB250 LB275 LB370 LB380Wavelength (nm) 308 308 308 308Energy Density (mJ/cm2)(at laser pulse energy 1050 mJ)

Specification >_650 >_620 >_450 >_430Typical Value ~800 ~720 ~550 ~530

Beam Length (mm) 250 275 370 380(at 96% from mean value) (+10/-0) (+10/-0) (+10/-0) (+10/-0)Beam Width (µm) 400 400 400 400(at 96% from mean value) (±10) (±10) (±10) (±10)

Homogeneity Long Axis (at 96% from mean value)Specification <_1.4%, 2 sigma <_1.4%, 2 sigma <_1.4%, 2 sigma <_1.4%, 2 sigmaTypical Value <_1.0%, 2 sigma <_1.0%, 2 sigma <_1.0%, 2 sigma <_1.0%, 2 sigma

Steepness short axis (µm) <_100 <_100 <_100 <_100(90% to 10%), open slit

Depth of focus (DOF)(µm) ±200 ±200 ±200 ±200

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4. Options

Micro Smoothing Device

Beam Profiler

Pulse Duration Extender

Pulse Expander Module

Alignment Tool

Energy Density Monitor

38

UV O

ptical Systems

LineBeamSystem for Crystallization Annealing Applications


5. System Overview - LineBeam Optics 380

A LaserB Attenuator ModuleC Telescope Lens TL1D Telescope Lens TL2E Telescope Lens TL3F Homogenizer Array (LAH1)G Homogenizer Array (LAH2)H Condenser Lens (CLLA)I Homogenizer Array (SAH1)J Homogenizer Array (SAH2)K Condenser Lens (CLSA)L Field Lens (FL)M Slit MaskN CCD Camera Alignment ToolO Field Curvature Correction Lens (FCCL)P Projection Lens DoubletQ Beam Profiler CCD Camera and Power MeterR Substrate SurfaceS Micro Smoothing Device (optional)1 Optics Module #12 Optics Module #2

W1 Entrance WindowW2 Exit Window (power meter port)W3 Exit WindowSA Attenuator SubstrateSC Compensator SubstrateMX Mirrors Laser Beam Path and Power Meter PortMAX Mirrors Alignment ToolMBP Mirror Beam ProfilerPM Power Meter (optional)

39

UV Optical Systems

VarioLas FamilyUV Optical Systems - Material Processing Systems

1. Description

VarioLas UV material processing systems based on theCOMPexPro 100 excimer laser series are affordable tools for high quality UV microprocessing. Superior optics design,rugged mechanics and unmatched pulse-to-pulse stabilityare the key ingredients to each of the VarioLas systems which are available for the common excimer laser wave-lengths 193 nm, 248 nm and 308 nm.

VarioLas mask imaging systems ECO and PRO provide micro-machining resolutions of 30 µm and 5 µm, respectively, at afield size of 2 x 2 mm2 and are ideal for machining of all kinds ofmaterials such as polymers, semiconductors, ceramics or glasses.

The VarioLas SWEEP supports scanned, large-area processing with a 50 x 0.6 mm2 line beam for applicationssuch as dopant activation of wafers and surface annealing.

Each VarioLas version can be tailored to best suit the individual requirements. From a pure UV beam projectiontrain providing a maximum degree of customization to a fully automated Class 1 microprocessing workstation.



High Energy Excimer • Superior pulse-to-pulse stabilityLaser Inside • Largest on-sample fluence range

• Hands-off operation over weeks

Rock Solid Optical and • Maintenance-free operationMechanical Design • Unmatched processing stability

Modular Concept with • Customizable from optical beamUpgrading Options train to ready-to-use workstation

3. Specifications1

Wavelength (nm) VarioLasECO VarioLasPRO VarioLasSWEEPField Geometry All Square Square LineMask Field Size (mm2) All 20 x 20 20 x 20 -Substrate Field Size (mm2) All 2 x 2 2 x 2 50 x 0.6Resolution (µm) All 30 5 -Working Distance (mm) All 50 50 150Maximum Repetition Rate2 (Hz) All 100 100 100Maximum Energy Density (mJ/cm2) 193 1000 1000 230

248 3500 3500 600308 3000 3000 500

Energy Stability (%, rms) 193 2 2 2248 1 1 1308 1 1 1

Pulse Width (ns) 193 15 15 15248 20 20 20308 20 20 20

Part No.3 193 1156386 1156390 1156394248 1156387 1156391 1156395308 1156388 1156392 1156396

1 All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.

2 With COMPexPro 110 laser model (Maximum 20 Hz with COMPexPro 102 laser model).3 VarioLas beam delivery requires COMPexPro 102 or 110 laser model.

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40

VarioLas FamilyUV Optical Systems - Material Processing Systems


WeightVarioLas beam delivery system 500 kg/1100 lbs.COMPexPro 102/110 laser model 250 kg/551 lbs.

Cooling Air (if used with COMPexPro 102 laser model)Water, 2 to 3 l/min. (0.5 to 0.8 gal./min.), 15 to 20°C

Electrical 230V, ±10%, 16A, 50/60 Hzswitchable, 1-phase115V, ±10%, 25A, 50/60 Hzswitchable, 1-phase

Options 20 Hz or 100 HzCOMPexPro 100 laser model

Dimensions (L x W x H) 3300 x 1200 x 1830 mm(131 x 48 x 73 in.)

5. Accessories

Part No. Safety Options

1161813 Class 1 housing

1161812 Automated safety class 3 interlock circuit

1107556 Automated beam shutter for 193 nm



Part No. Control Options

1161814 Control PC (with monitor)

1161815 Substrate stage (3-axes incl. substrate chuck)

1161816 Observation unit (for VarioLasPRO, 193 nm)

1161817 Observation unit (for VarioLasPRO, 248 nm/308 nm)

1161818 Observation unit (for VarioLasECO, all wavelengths)

1161819 Motorized attenuator (upgrade)

1161820 Mot. Attenuator, Energy Control, PRO/ECO, 193 nm




UV O

ptical Systems

41

GeoLasProUV Optical Systems - Solid Sampling System for LA-ICP-MS

1. Description

The GeoLasPro makes the most out of today’s advanced mass spectrometers. It provides unmatched energy densitiesranging from 1 J/cm2 up to 45 J/cm2 for material-independentsolid sampling. GeoLasPro utilizes sophisticated homogeniz-ing optics to ensure accurate and shallow depth control,along with flat-bottom craters. Using 193 nm wavelength insolid sampling produces smaller particle sizes, highest signalintensities and lowest intrinsic fractionation due to optimummaterial-light interaction. GeoLasPro has a rigid design whichis virtually maintenance-free and allows the user to focus on what he is really interested in – uncompromised solidsampling and data recording day after day.



High Energy 193 nm • Superior pulse-to-pulse stabilityCOMPexPro Inside • Hands-off operation over weeks

Petrographic • Superior observation capabilitiesMicroscope • Easy localization of fluid inclusions

Large Range of • Accurate ablation of all materialsEnergy Densities • Precise depth profiling

3. Specifications1

GeoLasPro

Wavelength (nm) 193

Energy Density on Sample 1 to 45(J/cm2)

Spot Size at Sample (µm) 4 to 160

Pulse Stability (%, rms) 2

Repetition Rate (Hz) 1 to 100

Resolution x,y-stage (µm) 1

Resolution z-stage (µm) 0.25 to 0.5

Part No. 1114413 (230V)1114414 (115V)

1 All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.

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UV Optical Systems

42

GeoLasProUV Optical Systems - Solid Sampling System for LA-ICP-MS


WeightGeoLasPro system 450 kg/990 lbs.COMPexPro 102 laser model 250 kg/551 lbs.

Cooling Air

Electrical 230V, ±10%, 16A, 50/60 Hzswitchable, 1-phase115V, ±10%, 25A, 50/60 Hzswitchable, 1-phase

Dimensions (L x W x H) 2600 x 970 x 1440 mm(104 x 39 x 57 in.)

5. Accessories


1161814 Class 1 Housing

1161815 Manual Aperture Mask Slider


UV O

ptical Systems

43

5X Optical SubsystemsUV Optical Systems

1. Description

MicroLas 5x optical subsystems are manufactured for integration into workstations. Configurations consist of anattenuator module, deflection mirrors, telescope lenses,homogenizer optics, field lenses and a projection lens (imaginglens). Each system's design can also include observationoptics with CCD cameras, an optional beam profiling monitor,as well as additional sensors and actuators.

2. Specifications1

Optics Subsystem for Integration

Operating Wavelength 248 nm or 308 nm

Field Size (mm2) 15.2 x 1.1 (other sizes on request)

Energy Density (mJ/cm2)with LSX 200K (248 nm) 1220with LSX 200C (308 mm) 1400

Field Size at Mask (mm2) 75 x 6 mm2

Inhomogeneity <_ ±2.5% (2 sigma)

Projection Lens 5x/18 NA = 0.13Field of View: 18 mmResolution: 2 microns(diffraction-limited)

Concentricity <= 0.7°

Mask Field Observation (mm2) 3.5 x 2.6 mm2

Substrate Fieldof Observation (µm2) 600 x 450

Part No. 1137126

3. Options

Beam profiler package

Pupilometer monitor optics

Power meter-port with mirror on manual slide

Depolarizer

Focus monitor

LTS PLUS lens temperature stabilization

Laser distance sensor

Field enlargement mirror

Base honeycomb table

Mask stage

Mask holder

Principal sketch of 5X Optical Subsystem.

1 All specifications are typical data and are subject to change withoutprior notice in order to provide the best product possible.

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UV Optical Systems

44

CrystaLas Optical SystemUV Optical Systems

1. Description

CrystaLas is an excimer laser-based optical system for the annealing and crystallization of thin silicon films. The system's flexible design allows annealing processes on laboratory samples, as well as on large-size substrates. This system uses a mask imaging technique to generate polycrystalline thin films. CrystaLas is designed for integrationinto a complete fabrication system using LAMBDA SX excimer lasers on industrial production lines. Furthermore,CrystaLas is an ideal research tool for developing new production processes in the semiconductor and flat-paneldisplay industry.

2. Specifications1

Example of a 308 nm CrystaLas Optical System— 18 mm and 30 mm Field of View (FOV)


Optical >40% >40%Efficiency (typ.)

Projection Lens 5X/18 5X/30NA 0.13 diffraction- 0.1 diffraction-

limited limitedDemagnification 5X 5XField of View (mm) 18 30

Field Size at Mask (mm) 50 x 10 125 x 5

Homogeneity (2 s) 2.5% 2.5%

Field Size at Substrate (mm) 10 x 2 25 x 1

Energy Density (mJ/cm2) >1000 >1000

Part No. 1900053 1900175

SLS-generated polycrystallinesilicon film.

CrystaLas Optical Subsystem for generation 4 TFT p-Si thin film annealing.

1 All specifications are typical data and are subject to change without prior notice in orderto provide the best product possible.


UV O

ptical Systems

45

ComponentsUV Optical Systems

Attenuator Module

Attenuator Module, Manual Variable attenuation substrate 60 x 35 x 2 mm3with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. With manual knob and digital scale for accurate transmittance setting. Electromagnetic shutter.

Attenuator Module, Motorized Variable attenuation substrate 60 x 35 x 2 mm3with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. With DC motor and encoder, ATM RS-232 interface module, interface cables, mini-controller and control software for Windows*. Electromagnetic shutter.

Attenuator Module for 157 nm Leak-tight module housing with observation window. Variable attenuation substrate 60 x 35 x 2 mm3with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. Manual knob and digitalscale for transmittance setting. Electromagnetic shutter. Flanges for tube connections and vacuum exhaust. Purge gas inlet and exhaust gas outlet with gate valve.

1. Specifications

Wavelength Attenuator Module, Attenuator Module, Attenuator Module(nm) Manual Motorized for 157 nm

Part No. 157 1111338193 2910218 1116186248 2910216 2910566308 1116181 1116184351 1116182 2910568

Attenuator module.

* Windows is a registered trademark of Microsoft Corporation.

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UV Optical Systems

46


1. Specifications Homogenizers

Homogenizer 5x5 Homogenizer 10x10 Homogenizer 20x20

Homogenized Field Size (mm) 5 x 5 10 x 10 20 x 20

Zoom ±10% ±10% ±10%

Homogeneity <±5% <±5% <±5%

Field Position Entrance aperture Entrance aperture Entrance apertureApprox. 600 mm 32 x 32 mm, 29.6 x 29.6 mm, 29.6 x 29.6 mm,after Homogenizer Exit overall size entrance-exit overall size entrance-exit overall size entrance-exit(depending on wavelength) approx. 1100 mm approx. 1000 mm approx. 900 mm

(depending on wavelength) (depending on wavelength) (depending on wavelength)

Other versions on request Field dimensions from 4 x 4 mm up to 200 mm

Part No. 193 nm 1116198 1116202248 nm 1116199 1116203308 nm 1116200 1116204351 nm 1116201 1116205


Homogenizer setup in separate x, y, phi mounts.

UV O

ptical Systems

47


1. Specifications Projection Lenses

P-lens 4-10x/4-xxx P-lens 5x/18-xxx P-lens 5x/30-xxx Doublet 50-xxx Doublet 100-xxx

Wavelength (nm) 157 157193 193 193248 248 248 248308 308 308 308 308351 351 351

Demagnification 4 to 10x 5x 5x Variable Variable(higherdemagnificationon request)

Focal Length (mm) approx. 100 approx. 50 approx. 100

Image Field 4 mm 18 mm 30 mm Depending on Depending onDiameter wavelength wavelength

Numerical Depending on 0.13 0.1 - -Aperture wavelength (diffraction-limited) (diffraction-limited)

(diffraction-limitedfor all availablewavelengths)

Spatial Resolution 3 µm 2 µm 2.5 µm 50 µm 50 µmlines and spaces lines and spaces lines and spaces lines and spaces lines and spaces

Working Distance Depending on Depending on Depending on Approx. 35 mm Approx. 70 mmwavelength, wavelength wavelengthuse of eyepiece, anddemagnification

Tracking Length Depending on 800 mm 1050 mm Depending on Depending onwavelength, use wavelength and wavelength andof eye piece, and demagnification demagnificationdemagnification ratio ratio

Transmission >80% >80% >80% - -

Part No. 157 nm 1116211 1116216193 nm 9680011 1116212 1116217248 nm M290009 M290022 1137121 1116213 1116218308 nm 1116206 M290008 9680052 1116214 2921330351 nm 1116207 1116215 1116219

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UV Optical Systems

With over 40 years of experience supporting critical laser environments, Coherent knows how important it is to establish lastingpartnerships that enable our customers to achieve success today and well into the future. With Coherent's wide range of serviceproducts, everything you need is under one roof, designed to safeguard and enhance your investment.

• Value based service agreement programs

• Custom Service Agreements to meet your unique needs

• Factory-trained service engineers across the globe

• Knowledgeable technical support that is only a phone call away

48

Customer Support

ServiceProductivity Plus Service Agreement


• On site and factory tailored training courses

• Certified high quality parts and accessories, consumables and upgrades, all designed exclusively for your Coherent laser along its lifecycles

• Customer documents (e.g. detailed manuals)

Productivity Plus

Product Description PN for 12 monthagreement

ExciStar XS/Xantos XS 1169709

IndyStar 1169710

BraggStar S Industrial 1169710

COMPexPro 1169717

LPXpro/LPFpro 1169716

Productivity Plus™ Service Agreement

The Support you need to stay up and running

The Productivity Plus service agreement provides the highestlevel of customer care available anywhere. It goes beyondyour warranty and guarantees the performance of your sys-tem. Productivity Plus (PPlus) protects your productivity andprofitability from unexpected downtime and is available formost current Coherent products.

PPlus Service Agreements protect your investment with:• Priority on-site service• Preventative maintenance visits• Unlimited access to the best tech support in the industry

PPlus Service Agreements save you money by:• Protecting your investment in Coherent products• Covering parts and labor• Simplifying service costs

Coherent understands that each operation has its own support needs. We offer you a variety of support plans tochoose from.

49

ServiceTraining Programs

Training Courses

Product Line A/1 day A/2 days AB/4 days ABC/5 days

ExciStar XS/Xantos XS series 1170393 1170393 1170393 1170393

IndyStar series 1170394 1170394 1170394

COMPexPro series 1100554 1100554 1100554

LPXpro/LPFpro series 1100598 1100598 1100598

Product Line A/2 days AB/4 days ABC/10 days

LEAP series 1170395 1170395 1170395

LAMBDA SX series 1154279 1154279 1154279

VYPER series 1192273 1192273 1192273

UV Optical Systems 1100604 1100604 1100604

Custom

er Sup

port

• Toll Free: (800) 367-7890 • Tel: (408) 764-4050 • Fax: (408) 764-4646

A Laser operationAB Laser operation and maintenanceABC Laser operation, maintenance, trouble shooting,

and service procedures• Fully staffed training department at Coherent GmbH in Goettingen, Germany

• Use the latest in presentation materials and techniques including manuals, video overheads and a fully equipped laboratory for hands-on training experience

• Train, re-train, update/improve FSE skills

• Train, to various levels, OEM FSE in a variety of laser types and applications

• End customer training when requested

• Factory and on site tailored training courses

• Class size restrictions are strictly enforced (max. of 4 trainees per class)

BraggStar/IndyStar

COMPexPro 50

LPXpro/LEAP

LSX 200/300 Hz

ExciStar XS/Xantos XS

LSX 600 Hz

Laser Measurement and Control AccessoriesMatrix of Recommendations

50Superior Reliability & Performance • www.Coherent.com • [email protected]

LMC Accessories

Power Measurement

FieldMaxII-TO with PM10X • • •

FieldMaxII-TO with PM30X

FieldMaxII-TO with PM150X • •

FieldMaxII-TO with PM300F-50X •

FieldMaxII-TO with PM1KX •

Energy Measurement

LabMax-TOP with J-25MUV-xxx • •

LabMax-TOP with J-25MT-10KHZ •

FieldMaxII-TOP with J-50MUV-xxx • •

FieldMaxIITM-TOP

1098580 FieldMaxII-TOP meters work with a broad range of thermopile, optical and pyroelectric sensors to measure power from nW to kW, energy from nJ to J, and from the UV to the IR. USB connectivity and a PC applications software suite allow live monitoring of multiple meters simultaneously, data logging, and statistical analysis. LabVIEW* drivers and an ActiveX* library provide the ability to completely control the meter remotely via a PC with customized software. The rechargeable battery and programmable analog output provide portability and convenience.

FieldMaxII-TO

1098579 Power-only version of the FieldMaxII that works with thermopile and optical sensors.

LabMaxTM-TOP Meters

LabMax-TOP LabMax meters are ideal for anyone who needs to analyze and monitor laser 1104622 output. Data can be analyzed via statistical and trend analysis and stored in

LabMax-TOP w/GPIB onboard flash memory for future retrieval with the File Manager tool. 1104620 Alternatively, data can also be processed directly on a PC through USB, RS-232

and optional GPIB interfaces, or by logging data to a USB flash drive attached directly to the meter. Installable applications software and LabVIEW drivers are provided to support PC interfacing. The LabMax display can be positioned at many different angles so customers can place it within the limited bench space typically available in a laser lab and still easily view the display. LabMax-TOP is directly compatiblewith most Coherent thermal, pyroelectric and semiconductor sensors. Used with EnergyMax sensors, LabMax-TOP can measure nJ to joules and up to 10 kHz.

COMPexPro 100/200

Laser Measurement and Control AccessoriesMatrix of Recommendations

51• Toll Free: (800) 527-3786 • Tel: (408) 764-4983 • Fax: (800) 362-1170

LMC Ac

cessories

LabMax-TO

1104619 Power-only version of the LabMax that works with thermopile and optical sensors.

PowerMaxTM Power Sensors

PM10X PowerMax PM-model thermopile sensors are compatible with FieldMaxII 1098423 and LabMax meters (both -TOP and -TO models) and provide accurate

PM30X measurement of average laser power. For excimer applications, our X-coating 1098498 offers damage and bleaching resistance in the ultraviolet. NIST-traceability

PM150X and spectral mapping of the sensor response, loaded into EEPROM for 1098455 automatic wavelength compensation, ensures measurement accuracy

PM1KX throughout the ultraviolet.1115484

EnergyMaxTM Energy Sensors

J-25MT-10KHZ With the EnergyMax family of pyroelectric sensors, robust MaxUV, MaxBlack 1110747 and diffuse metallic sensor coatings offer a high damage threshold and

J-25MUV-193 long-term stability, which is further increased on certain models with the use1110741 of optimized diffuser stacks. Spectral mapping of all sensors and diffusers

J-25MUV-248 allows easy wavelength compensation and ensures accuracy throughout 1110745 the ultraviolet. The addition of thermal compensation gives measurement

J-50MUV-248 accuracy that is unaffected by ambient conditions and average power levels. 1110572 The electronic design offers a very high dynamic range and highly accurate

J-50MUV-193, no diffuser and linear repetition rate performance from large diameter sensors. Coupled with a robust mechanical1146237 and electronic design that provides excellent noise immunity, EnergyMax is ideally suited for measuring

J-50MUV-248, no diffuser the pulse energy from excimer lasers.1146243

J-50MB-YAG1110744

EnergyMax Heat Sinks

Small Heat Sink for Optional heat sinks are available for EnergyMax sensors. Coupled with the J-25 Model Sensors sensors' inherent thermal compensation, these heat sinks allow pulse energy

1123430 measurements at average powers in the tens of Watts – ideal for higherMedium Heat Sink for average power excimer lasers.J-50 Model Sensors

1123431Large Heat Sink forJ-50 Model Sensors

1123432

All Coherent product names are trademarks of Coherent, Inc.*All products indicated by an asterisk are registered trademarks of their respective companies.

Contact Us by Phone

Coherent, Inc.(800) 527-3786 or (408) 764-4983

Benelux: +31 (30) 280 6060

China: +86 (10) 6280 0209

France: +33 (0)1 8038 1000

Germany: +49 (6071) 968333

Italy: +39 (02) 31 03 951

Japan: +81 (3) 5635 8700

Korea: +82 (2) 460 7900

United Kingdom: +44 (0) 1353 658833

Contact Us by Email

Laser Products: [email protected]

How to Contact Us

• Toll Free: (800) 527-3786 • Tel: (408) 764-4983 • Fax: (800) 362-1170

Use the Product and Application Finders belowto quickly get more helpful details.

Extensive Laser Finder

Application Reports

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Technical Illustrations, Videos

Brochures, Tech Notes, Data Sheets

for more information about how Coherent canenable your excimer laser application.

www.Coherent.com/excimerwww.Coherent.com/uvopticalsystems

Visit the Coherent Website

Coherent, Inc.5100 Patrick Henry DriveSanta Clara, CA 95054phone (800) 527-3786

(408) 764-4983fax (408) 764-4646e-mail [email protected]

Benelux +31 (30) 280 6060China +86 (10) 6280 0209France +33 (0)1 8038 1000Germany +49 (6071) 968 333Italy +39 (02) 31 03 951Japan +81 (3) 5635 8700Korea +82 (2) 460 7900UK +44 (1353) 658 833

www.Coherent.com

Coherent as your partner.To compete and succeed in today’s fast-paced research and manufacturing environments, you need a laser partner who understands your needs. A partner who can provide a wide range of technologysolutions, and the support that goes with them.

Since 1966, Coherent has been helping customers by providing complete laser-based solutions for a wide range of commercial and scientific applications.

With a history of providing superior reliability and superior performance in our products, we are themost forward-thinking and diversified manufacturer of solid-state, gas, excimer and semiconductorlasers in the industry.

For more information, visit us on the Web at www.Coherent.com. Or call 800-527-3786.

Printed in the U.S.A. MC-028-09-0M0311Rev.ACopyright ©2011 Coherent, Inc.

Documents

coherant Excimer ProductGuide2011