8
Angular Dispersions in Terahertz Metasurfaces: Physics and Applications Meng Qiu, 1,* Min Jia, 1,* Shaojie Ma, 1 Shulin Sun, 2 Qiong He, 1,3,and Lei Zhou 1,3,1 State Key Laboratory of Surface Physics, Key Laboratory of Micro and Nano Photonic Structures (Ministry of Education), and Department of Physics, Fudan University, Shanghai 200433, China 2 Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Green Photonics and Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China 3 Collaborative Innovation Center of Advanced Microstructures, Nanjing 210093, China (Received 11 March 2018; published 31 May 2018) Angular dispersionthe response of a metasurface strongly depending on the impinging angleis an intrinsic property of metasurfaces, but its physical origin remains obscure, which hinders its applications in metasurface design. We establish a theory to quantitatively describe such intriguing effects in metasurfaces, and we verify it by both experiments and numerical simulations on a typical terahertz metasurface. The physical understanding gained motivates us to propose an alternative strategy to design metadevices exhibiting impinging-angle-dependent multifunctionalities. As an illustration, we design a polarization- control metadevice that can behave as a half- or quarter-wave plate under different excitation angles. Our results not only reveal the physical origin of the angular dispersion but also point out an additional degree of freedom to manipulate light, both of which are important for designing metadevices facing versatile application requests. DOI: 10.1103/PhysRevApplied.9.054050 I. INTRODUCTION Metasurfaces are planar metamaterials composed of subwavelength microunits (e.g., meta-atoms) with tailored electromagnetic (EM) properties [1,2]. Many fascinating wave-manipulation effects have been discov- ered based on carefully designed periodic [319] or inhomogeneous gradient metasurfaces [2027], such as polarization control [38], perfect absorption [912], tunneling-induced transparency [1416], anomalous reflec- tion or refraction [20,21], propagating-wave-to-surface- wave conversion [22,23], and other interesting effects [13,1719,2427]. The functional devices realized based on these fascinating effects are thin, flat, and highly efficient, making them favorable for integration-optics applications. In designing these metasurfaces, a commonly adopted approach is to utilize the EM properties (i.e., amplitude and/or phase of transmission and/or reflection) of meta- atoms under normal-incidence excitations. However, in certain cases, the EM response of a metasurface may change dramatically as the excitation angle variesa phenomenon usually called angular dispersion, as sche- matically depicted in Figs. 1(a) and 1(b). In practical metasurface design, scientists have usually made great effort to avoid such an effect by seeking structures with weak angular dispersions [9,12,2832]. However, the intrinsic physics underlying this intriguing behavior has not been adequately investigated; thus, scientists usually rely on brute-force simulations to search for structures exhibiting weak angular dispersions. Knowing little about how to manipulate the angular dispersion of metasurfaces, scientists certainly cannot utilize it in metasurface design. In this paper, we show that the angular dispersion of a metasurface is dictated by the plasmonic couplings among meta-atoms inside the structure, and we further establish a theory to quantitatively analyze such behaviors in periodic metasurfaces by extending the photonic tight-binding method (TBM) developed previously for few-resonator systems [33] to the present periodic systems. Our theory is validated by both experiments and full-wave simulations on a typical periodic terahertz metasurface, which exhibits intriguingly opposite angular dispersions for oblique inci- dent waves taking transverse-electric (TE) or transverse- magnetic (TM) polarizations. The physics gained through analyzing these fascinating effects motivates us to propose an alternative strategy to design a multifunctional meta- device; that is, we can control the angular dispersion of a metasurface such that it can function distinctly when seenat different incident angles. As a proof of concept, we design a bifunctional metadevice that exhibits distinct polarization-control capabilities for incident beams coming from different angles [see Figs. 1(c) and 1(d)]. Our findings can help us to understand and manipulate the angular * These authors contributed equally to this work. Corresponding author. [email protected] Corresponding author. [email protected] PHYSICAL REVIEW APPLIED 9, 054050 (2018) 2331-7019=18=9(5)=054050(8) 054050-1 © 2018 American Physical Society

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Page 1: Angular Dispersions in Terahertz Metasurfaces: …...Angular Dispersions in Terahertz Metasurfaces: Physics and Applications Meng Qiu,1,* Min Jia,1,* Shaojie Ma,1 Shulin Sun,2 Qiong

Angular Dispersions in Terahertz Metasurfaces: Physics and Applications

Meng Qiu,1,* Min Jia,1,* Shaojie Ma,1 Shulin Sun,2 Qiong He,1,3,† and Lei Zhou1,3,‡1State Key Laboratory of Surface Physics, Key Laboratory of Micro and Nano Photonic Structures(Ministry of Education), and Department of Physics, Fudan University, Shanghai 200433, China

2Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Green Photonicsand Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China

3Collaborative Innovation Center of Advanced Microstructures, Nanjing 210093, China

(Received 11 March 2018; published 31 May 2018)

Angular dispersion—the response of a metasurface strongly depending on the impinging angle—is anintrinsic property of metasurfaces, but its physical origin remains obscure, which hinders its applications inmetasurface design. We establish a theory to quantitatively describe such intriguing effects in metasurfaces,and we verify it by both experiments and numerical simulations on a typical terahertz metasurface. Thephysical understanding gained motivates us to propose an alternative strategy to design metadevicesexhibiting impinging-angle-dependent multifunctionalities. As an illustration, we design a polarization-control metadevice that can behave as a half- or quarter-wave plate under different excitation angles. Ourresults not only reveal the physical origin of the angular dispersion but also point out an additional degreeof freedom to manipulate light, both of which are important for designing metadevices facing versatileapplication requests.

DOI: 10.1103/PhysRevApplied.9.054050

I. INTRODUCTION

Metasurfaces are planar metamaterials composed ofsubwavelength microunits (e.g., “meta-atoms”) withtailored electromagnetic (EM) properties [1,2]. Manyfascinating wave-manipulation effects have been discov-ered based on carefully designed periodic [3–19] orinhomogeneous gradient metasurfaces [20–27], such aspolarization control [3–8], perfect absorption [9–12],tunneling-induced transparency [14–16], anomalous reflec-tion or refraction [20,21], propagating-wave-to-surface-wave conversion [22,23], and other interesting effects[13,17–19,24–27]. The functional devices realized basedon these fascinating effects are thin, flat, and highly efficient,making them favorable for integration-optics applications.In designing these metasurfaces, a commonly adopted

approach is to utilize the EM properties (i.e., amplitudeand/or phase of transmission and/or reflection) of meta-atoms under normal-incidence excitations. However, incertain cases, the EM response of a metasurface maychange dramatically as the excitation angle varies—aphenomenon usually called angular dispersion, as sche-matically depicted in Figs. 1(a) and 1(b). In practicalmetasurface design, scientists have usually made great

effort to avoid such an effect by seeking structures withweak angular dispersions [9,12,28–32]. However, theintrinsic physics underlying this intriguing behavior hasnot been adequately investigated; thus, scientists usuallyrely on brute-force simulations to search for structuresexhibiting weak angular dispersions. Knowing little abouthow to manipulate the angular dispersion of metasurfaces,scientists certainly cannot utilize it in metasurface design.In this paper, we show that the angular dispersion of a

metasurface is dictated by the plasmonic couplings amongmeta-atoms inside the structure, and we further establish atheory to quantitatively analyze such behaviors in periodicmetasurfaces by extending the photonic tight-bindingmethod (TBM) developed previously for few-resonatorsystems [33] to the present periodic systems. Our theoryis validated by both experiments and full-wave simulationson a typical periodic terahertz metasurface, which exhibitsintriguingly opposite angular dispersions for oblique inci-dent waves taking transverse-electric (TE) or transverse-magnetic (TM) polarizations. The physics gained throughanalyzing these fascinating effects motivates us to proposean alternative strategy to design a multifunctional meta-device; that is, we can control the angular dispersion of ametasurface such that it can function distinctly when “seen”at different incident angles. As a proof of concept, wedesign a bifunctional metadevice that exhibits distinctpolarization-control capabilities for incident beams comingfrom different angles [see Figs. 1(c) and 1(d)]. Our findingscan help us to understand and manipulate the angular

*These authors contributed equally to this work.†Corresponding author.

[email protected]‡Corresponding author.

[email protected]

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dispersions of metasurfaces, which can significantlyexpand our capabilities of designing metasurface-basedfunctional devices.

II. ANGULAR DISPERSIONS OF A TERAHERTZMETASURFACE: EXPERIMENTAL RESULTS

We start by experimentally characterizing the richangular-dispersion behaviors of a typical terahertz metasur-face, consisting of a periodic array of subwavelengthmetallic split-ring resonators (SRRs) on a dielectric sub-strate [see Fig. 2(a) for the sample picture]. The reason thatwe choose SRR as ourmeta-atom is that a SRR exhibits veryintriguing EM responses [34–36], leading to rich couplingeffects between two such meta-atoms, as has already beendemonstrated in Refs. [33,37,38]. Specifically, at its lowestresonance, a SRR exhibits a magnetic dipole moment (m)perpendicular to its plane as well as an electrical dipolemoment (p) along an in-plane direction dictated by the gapposition. As a result, we expect that a metasurface formedby such meta-atoms should exhibit very rich angulardispersions, sensitively depending on the orientation angleα of the SRR gap. Therefore, we purposely fabricatea series of terahertz metasurfaces following standardphotolithography procedures, in which the SRRs possessidentical geometrical parameters (see the caption of Fig. 1)but with different orientation angles (α ¼ 0°, 15°, 30°, 45°,60°, 75°, and 90°). In all of these samples (all exhibiting atotal size of 1 × 1 cm2), the metallic structures are madewith a 60-nm-thick Au film plus a 5-nm-thick Cr film asadhesion layer, and they are deposited on 500-μm-thickquartz substrates.

We characterize the angular dispersions of these fab-ricated metasurfaces by measuring their transmittancespectra at different incident angles θ, using a terahertztime-domain spectroscopy. As is schematically depicted inFig. 2(b), in order to correctly and efficiently excite theresonant modes in SRRs and make fair comparisonsbetween samples with different values of α, we purposelyset the in-plane component of the incident E field strictlyparallel to the intrinsic p moments possessed by the SRRs[see the inset in Fig. 2(b)], and we vary the incidentk vector within the x-z plane to measure the correspondingtransmittance spectra at different incident angles.Obviously, our experimental configuration correspondsto the TM (TE) excitation for the sample with α ¼ 90°(α ¼ 0°). For other samples with arbitrary α values, ourmeasurements do not correspond to any well-defined TE orTM excitation, but the obtained transmittance spectra still

(a) (c)

(b) (d)

FIG. 1. (a),(b) Manifestation of angular dispersion in meta-surfaces (MS) represented by resonant frequency shift (f1 ≠ f2)of a metasurface seen at different incidence angles (θ1 ≠ θ2).(c),(d) Schematics of an incident-angle-dependent multifunc-tional metadevice for polarization control on a reflective beam.Here, the metadevice can convert a linearly polarized (LP) waveto a right-handed (RCP) or left-handed circular-polarized (LCP)wave under different incidence angles.

(a)

(c)

(e) (f)

(d)

(b)

Expt.

E f ield

E f ield

FIG. 2. (a) Optical picture of part of the fabricated terahertzmetasurface sample. (b) Schematics of our experimental char-acterizations on angular dispersion of the terahertz samples. Theincident light lies in the x-z plane, while the in-plane E field ispolarized along the direction, as shown in the inset. (c),(d)Measured (scatter) transmittance spectra of the metasurfaces withdifferent incident angles for the TM (α ¼ 0°) and TE (α ¼ 90°)polarizations, respectively. (e),(f) Computed rescaled transmit-tance δT (color map) of two metasurfaces (with α ¼ 0° andα ¼ 90°) versus the frequency and incident angle, with starsrepresenting the measured resonant-mode positions. Geometricalparameters of the SRR: inner and outer radius, R1 ¼ 20 μm andR2 ¼ 30 μm; gap width, g ¼ 6 μm. Lattice constant of the array,P ¼ 70 μm.

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contain all necessary information on the angular disper-sions as long as the “modes” in different metasurfaces arecorrectly excited. All measured transmittance signals arenormalized against a reference signal, obtained underexactly the same excitation configuration, only with thesample replaced by a quartz substrate of the same thickness.The multiple scatterings of terahertz waves inside thesubstrate are purposely excluded in our measurementsthrough a standard time-domain cutoff procedure.Figures 2(c) and 2(d) compare, respectively, the trans-

mittance spectra of two representative samples (with α ¼ 0°and α ¼ 90°) measured at different incident angles θ. Theexcited resonance mode exhibits a clear frequency shift aswe vary θ for the two studied samples (see experimentalresults for other samples in the Supplemental Material[39]). Surprisingly, we note that the two metasurfacesdisplay opposite angular dispersions manifested by differ-ent signs of frequency shift. Specifically, whereas theα ¼ 0° metasurface exhibits a blueshift of resonant fre-quency as θ increases [Fig. 2(c)], the α ¼ 90° metasurfaceexhibits a redshift of resonant frequency [Fig. 2(d)]. Furthernoting the rotation symmetry between the two samples, wedraw an interesting conclusion that such a metasurfaceexhibits opposite angular dispersions when seen at differentpolarizations (TE or TM). Such an intriguing behavior hasrarely been noted in the literature.All experimental results are verified by full-wave simu-

lations on realistic metasurface structures based on finite-element-method (FEM) simulations [40]. The solid lines inFigs. 2(c) and 2(d) are FEM-simulated transmittance spectrafor different cases,which are all in reasonable agreementwiththeir experimental counterparts. Slight discrepancies betweenexperiments and simulations might be caused by sampleimperfections. To see the comprehensive angular-dispersionbehaviors, we plot in Figs. 2(e) and 2(f) the FEM-simulatedtransmittance versus frequency and incident angle for TM-and TE-polarization excitations, respectively. To increase thecontrast, we purposely show in Figs. 2(e) and 2(f) thetransmittance difference, δT ¼ T − Tres, with Tres beingthe computed transmittance at resonance (i.e., the minimumtransmittance) inside every spectrum. The positive andnegative angular dispersions of the metasurface under differ-ent excitations are clearly observed to be in excellent agree-ment with the experimentally measured transmittance-dippositions represented by the symbols. Again, more FEM andexperimental results can be found in the SupplementalMaterial [39] for other cases studied.

III. THEORETICAL ANALYSES OF ANGULARDISPERSIONS IN METASURFACES

Wenowestablish a theoretical framework to quantitativelyunderstand the intriguing angular dispersion behaviorsexperimentally revealed in the last section. According tothe Hamiltonian formalism established previously for dis-persive photonic systems [41], we understand that a single

resonator (SRR here) exhibits a plasmonic resonance at acertain frequency f0 with well-defined EM wave functionsjΦsðrÞi ¼ fEðrÞ; HðrÞg. When more plasmonic resonatorsare placed together, the modes associated with these reso-nators will couplewith each other. According to the photonicTBM established [33], we can explicitly calculate thecoupling strength between any two resonators via thefollowing formula,

tfk;lgfm;ng ¼ −f0RP�fm;ngðrÞ · Efk;lgðrÞdτ

hΦsjΦsi; ð1Þ

where Pfm;ngðrÞ denotes the polarization field inside the

meta-atom located at the lattice site Rfm;ng, while Efk;lgðrÞdenotes the E-field distribution generated by the meta-atomlocated at the lattice siteRfk;lg, and hΦsjΦsi is the normali-zation constant representing the total EM-field energy storedin a single meta-atom. The validity of such a theory was welljustified in Ref. [33] for few-resonator plasmonic systems. Inparticular, the TBM can precisely predict the frequencies ofthe hybridized modes in a two-resonator system, with allparameters calculated directly from Eq. (1) without anyfitting procedures.We now extend the TBM for few-resonator system to

present periodic metasurface system. In metasurfaceswhere meta-atoms are placed in a two-dimensional periodiclattice, any meta-atom can interact with others via thecoupling strengths defined in Eq. (1). As a result, couplingsamong these meta-atoms generate a branch of “collective”modes labeled by the Bloch k vector. Following thestandard procedure in solid-state physics [42], we findthat the eigenfrequency of a collective mode labeled by aBloch k vector is

fðkÞ ¼ f0 þXm;n

tfm;ngf0;0g cos

hk ·

�Rfm;ng −Rf0;0g

�i; ð2Þ

whereRf0;0g is the position of a reference meta-atom, whilethe summation runs over all neighboring meta-atoms thatcan have non-negligible couplings with the reference one.Obviously, the coupling strength decays as the distancebetween the two resonators is enlarged. We can consideronly a finite number of meta-atoms near the reference one,depending on the quality (Q) factor of the single-particleresonance. Since a higher Q factor indicates that the wavefunction of the resonance mode is more localized aroundthe meta-atom, fewer interparticle coupling terms areneeded to obtain a convergent result. In the present case,where the single-particle resonance exhibits a relatively lowQ factor, we consider the couplings between the centralmeta-atom and the other meta-atoms in a 5 × 5 square [theregion surrounded by the pink lines in Fig. 2(a)], in order tomake our TBM calculations convergent. We also performTBM calculations by considering the couplings between all

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meta-atoms in a 3 × 3 square and in a 7 × 7 square. Theformer exhibits huge deviations from the full-wave simu-lations, while the latter shows a slight improvementcompared to the calculations based on a 5 × 5 square.

With all involved parameters tfm;ngf0;0g computed from the

TBM based on Eq. (1) [43,44], we next use Eq. (2) tocalculate the dispersion relation fðkÞ of the collectivemode in different periodic metasurfaces. Noting that anincident wave can only excite a collective mode with amatched in-plane k vector, we understand that the dipfrequency of the measured or calculated transmittancespectrum at the oblique incidence θ must be the frequencyof the collective mode with the correct Bloch k vector.Putting k ¼ xk0 sin θ (k0 is the free-space wave vector ofincident light) into the computed fðkÞ function, we canthus predict how the transmittance-dip frequencies varyagainst the incident angle for different metasurfaces.The angular dispersions fðθÞ calculated with the TBM

for different samples are shown in Fig. 3(a) as dashed lines,which are in nice agreement with experimental (stars) andFEM results (solid lines). In particular, our TBM resultscorrectly reproduce the intriguing sign-change behavior ofthe angular dispersion as α decreases, and the critical valueof α is found to be around 60°. We note that the agreementbetween TBM and FEM is better for systems exhibitingweaker angular dispersion, which is reasonable since weconsider only the coupling terms inside the 5 × 5 array. Bytaking more coupling terms into account, more accurateresults are expectable for the system with stronger angulardispersion.To further understand why different metasurfaces exhibit

distinct angular dispersions, we simplify Eq. (2) as follows:

fðθÞ ¼ f0 þ J0 þ J1 cosðPk0 sin θÞ þ J2 cosð2Pk0 sin θÞ;ð3Þ

where P is the lattice constant, J0 denotes the effectiveintrarow coupling, while J1 and J2 denote the nearest-neighbor and next-nearest-neighbor effective intrarow cou-plings. These effective coupling coefficients are related tothe interparticle coupling strengths via

J0¼X2i¼−2

tfi;0gf0;0g; J1¼2X2i¼−2

tfi;1gf0;0g; J2¼2X2i¼−2

tfi;2gf0;0g: ð4Þ

Obviously, J0 does not contribute to the angulardispersion under our experimental configuration, but J1and J2 must make important contributions. Now bothcosðPk0 sin θÞ and cosð2Pk0 sin θÞ are decreasing functionsof θ in the small-θ regime, Eq. (3) tells us that the signs ofJ1 and J2 dictate the angular dispersions of the metasur-faces under study. Specifically, the resonance dip mustundergo a blueshift as θ increases if J1 and J2 are negative,and vice versa.

We now quantitatively compute through Eqs. (1) and (4),the two parameters J1 and J2 for metasurfaces withdifferent values of α. Figure 3(b) depicts how the calculatedJ1 and J2 values vary as a function of α. We note that J1 isroughly 10 times larger than J2 in most cases, which isreasonable since J1 represents the nearest-neighbor inter-row coupling. Quite as expected, while in the region ofα → 0°, both J1 and J2 are negative, leading to a positiveangular dispersion, they become both positive in the regionof α → 90°, which explains the negative angular dispersionfound in Figs. 2(e) and 2(f). Of particular interest is that

(a)

(b)

(c)

s

Expt.

FIG. 3. (a) Resonant frequency shifts versus incident angles formetasurfaces with different values of α obtained through experi-ments (the stars), FEM simulations (the solid lines), and TBMcalculations (the dashed lines). (b) J1 and J2 calculated with theTBM for samples with different α values. (c) Nearest-neighbor

coupling strength tð1;0Þð0;0Þ as a function of α, obtained through directTBM calculations (scatters) and through the effective modelEq. (5) (the red line). (Inset) Ez-field distribution on the structuresurface calculated with FEM simulations at frequency 0.63 THz.

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there exists a critical region [the shaded area in Fig. 3(b)]where J1 and J2 successively cross zero, which coincideswell with the sign-change angle of the angular dispersion,discovered in Fig. 3(a).However, J1 and J2 are still effective row-row couplings

which cannot directly reveal the inherent physics. Tounderstand the physics more deeply, we need to sort outthe most important terms in determining the angulardispersion. Noting that J1 is much larger than J2 [seeFig. 3(b)] and that, obviously, the nearest-neighbor cou-

pling tf0;1gf0;0g is the leading term in J1, we examine how tf0;1gf0;0gvaries against α. The computed tf0;1gf0;0g ∼ α relation, depictedin Fig. 3(c) as open circles, indeed has already exhibited theintriguing sign-change behavior in the vicinity of α ¼ 60°.We finally arrive at a position to set up a simple picture to

understand the intriguing angular dispersions revealed inFig. 2. As shown in the inset of Fig. 3(c), a SRR possessesan electric dipole moment p and a magnetic dipole momentm simultaneously. According to the effective model forplasmonic coupling developed in Refs. [37, 38], theplasmonic coupling strength between two such particlescontains four different terms, tpp, tmm, tradpp, and tpm,representing, respectively, the dipolar interactions fortwo different types of dipoles, the radiation-correctionterm, and a cross-interaction term between p and m. Inour studied case, while m is always along the z direction,the direction of p changes as a function of α. Taking thisinformation into consideration, we find from Ref. [38] thatthe inter-SRR coupling can be effectively rewritten as

tmodel¼A×

�p2ð1−3cos2αÞþ

�mc

�2

−p2ð1þcos2αÞðk0PÞ2

2−pmsinαðk0PÞ

c

�; ð5Þ

with A being a normalization constant. For the lowestresonance mode of a SRR, both p and m can contributeto the coupling strength, and their normalized amplitudes areof the same order (i.e.,p ∝ m=c). To only reveal the physicswithout involving too many complexities, we fix the ratiobetween p and m=c as 0.99, based on the finite-difference-time-domain-calculated current distributions in the struc-ture, and choose an appropriate normalization constantAp2 ¼ 6.01 GHz through a fitting with Fig. 3(c).Inserting these parameters into Eq. (5), we calculate tmodelas a function of α and then show the results in Fig. 3(c) as asolid line. Excellent agreement is found between theeffective-model results and the TBM curve.Such an effective model reveals the underlying physics

clearly. Now our meta-atom exhibits both electric andmagnetic dipole moments at its resonance, and the inter-particle couplings for two different types of momentsdisplay distinct dependences on the parameter α [seeEq. (5)]. It is the competition among the different coupling

terms that generates an extraordinary α dependence of thetotal coupling strength, leading to a sign change of theeffective row-row couplings between adjacent SRR arrays,which, in turn, finally results in the intriguing angulardispersions displayed in Fig. 2.In addition, our approach is also applicable to under-

standing the dispersion of surface-plasmon polaritons(SPPs) in systems consisting of an array of plasmonicresonators. By controlling the couplings between differentresonators, the dispersion of the SPP generated in suchsystems can be well controlled, yielding various fascinatingphysical effects, as has already been illustrated in theliterature [45–47].

IV. APPLICATIONS

Previous analyses motivate us to propose an alternativestrategy to design functional devices. Since the angulardispersion of a metasurface is mainly determined by theplasmonic coupling between two neighboring meta-atoms,we can purposely design relevant microstructures to controlthe angular dispersion of the metasurface to make itfunction distinctly when seen at different incidence angles.In what follows, we take a periodic metasurface as anexample to show how the strategy works.As schematically illustrated in Fig. 4(a), we use a metal-

insulator-metal (M-I-M) structure as the basic meta-atom indesigning our multifunctional metadevice. Such M-I-Mstructures have been widely used to realize high-efficiencymetadevices in the literature [22,48,49], with functional-ities ranging from polarization control to perfect absorp-tion, but these metadevices typically only exhibit singlefunctionality since these periodic homogeneous metasur-faces (not gradient ones) consist of only one independentmeta-atom and thus lack design freedom. In the following,we show that, in fact, the angular dispersion can be anadditional degree of freedom to offer more functionality toa metasurface, even though the system still consists of onlyone independent meta-atom.Our meta-atom is composed by an x-y isotropic metallic

cross-shaped resonator (consisting of two interconnectedmetallic H-shaped planar resonators) and a continuousmetal film separated by a 4-μm-thick dielectric spacer(εr ¼ 2.25). We assume that the metallic structures aremade by gold films with 1-μm thickness. Since the trans-mission channel is completely blocked by the metallic filmon the bottom, the systemmust be totally reflective and thuswe need to study only the reflection-phase responses (weneglect material losses for simplicity). The solid line inFig. 4(c) depicts the calculated reflection-phase spectrum ofour designed metasurface under normal-incidence excita-tion, which exhibits a well-defined magnetic resonance [seeFig. 4(b) for the simulated Ez-field distribution of themode] at f ¼ 0.54 THz, with the reflection phase under-going a 2π variation as the frequency passes through theresonant frequency. Since our meta-atom exhibits a fourfold

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symmetry, it is not surprising to see that the reflection-phasespectra of the metasurface are identical for Ekx (defined asTE polarization) and Eky (TM) polarizations under normalincidence.As the incidence angle θ varies,we find that the reflection-

phase spectra for the two polarizations change in a dra-matically different way. As shown in Fig. 4(c), whereas thereflection-phase spectra remain nearly unchanged for the TEincidence (the solid lines), they undergo considerablechange for varying values of θ for the TM case (the dottedlines). Because of the distinct θ dependences of the tworeflection-phase spectra, the two-cross-polarization phasedifference (Δϕ ¼ ϕTE − ϕTM) can be stronglymodulated bythe incidence angle θ, as shown in Fig. 4(e).These intriguing results suggest that our device exhibits

multiple polarization-control capabilities. Figure 4(f)shows that, at 0.55 THz, the Δϕ can be continuouslytuned from 0 to 1.55π as the incidence angle θ changesfrom 0° to 60°. Therefore, assuming that the input wave is

linearly polarized and can be decomposed into TE and TMmodes with equal amplitudes, the polarization state of thereflected wave can be efficiently controlled by varying theincident angle θ. For example, the polarization state ofthe reflected beam must be a right-handed circular polari-zation (RCP) at θ ¼ 27°, but changes to a linear polariza-tion (LP) with E perpendicular to its original direction atθ ¼ 34°, and it can be a left-handed circular polarization(LCP) at θ ¼ 47.5°. Other types of polarizations can also berealized at other incident angles or by changing thepolarization state of the input beam.Such dramatic modulations on EM responses of our

metasurface are caused by the controllable angular dis-persions of the device. The red and blue circles in Fig. 4(d)depict the simulated angular dispersions of our metadevicefor two different polarizations, showing that, indeed, theTM-mode frequency changes significantly as a function ofθ, while the TE mode does not. To understand the physicalorigins of such intriguing results, we employ the theory

h

L

L

w

P

h

p

f

(a)

(c)

(e) (f)

(d)

(b)

E f ield

E f ield

FIG. 4. (a) Side and top views ofthe designed meta-atom. (b) Ez-field distributions on the structuralsurfaces in two different cases,obtained with FEM simulations at0.54 THz under normal incidence.(c) FEM-simulated reflection-phasespectra of the designed metasurfaceshined by terahertz waves at differ-ent incident angles with TE (solidlines) and TM (dotted lines) polar-izations. (d) Resonant frequencyversus incident angle as the meta-surface is shined by oblique inci-dent waves taking TE (red) and TM(blue) polarizations, obtained withFEM simulations (the circles) andtheoretical calculations based on theTBM (the solid lines). (e) FEM-simulated reflection-phase differ-ence between TE and TM casesfor our metasurface versus incidentangle and frequency. (f) TE-TMreflection-phase difference (thesolid line) as a function of incidentangle, calculated with FEM simu-lations at 0.55 THz, showing thatthe reflected beam can exhibit dif-ferent polarization states if the inputwave is linearly polarized as de-picted in the inset. The geometricalparameters are P ¼ 100 μm, Lc ¼92 μm, Lb ¼ 40 μm, w ¼ 8 μm,hm ¼ 1 μm, and hi ¼ 4 μm.

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developed in the last section to compute the angulardispersions of the metasurface for different polarizations.Keeping only the nearest-neighbor inter-row coupling term,we find that the angular dispersions can be well describedby the formula fðθÞ ¼ f0 þ J1fcos½Pk0 sinðθÞ� − 1g, withf0 ¼ 0.5424 THz. We employ the TBM to calculate J1for the two cases and find that J1 ¼ 1.7 GHz (TE) andJ1 ¼ −48.6 GHz (TM). Putting these results into the aboveformula, we calculate the mode dispersions for the twopolarizations, and we depict the results in Fig. 4(d) by solidlines. Perfect agreement is found between the simulationand our TBM results.Now the principle to design our multifunctional

polarization-control metadevice is very clear. As shownin Fig. 4(b), the EM fields associated with the excitedresonance mode on the meta-atom are localized mainlyaround two metallic bars. In the TE case under study, theplasmonic coupling dictating the angular dispersion is duemainly to that between two nearest-neighbor meta-atomsplaced along the x direction. Since the hot spots in twometa-atoms are far away, they do not have strong con-tributions to the coupling, which explains why the TE modeshows negligible angular dispersion [see Fig. 4(b)].However, things are completely different for the TM casewhere the resonance field pattern is rotated by 90°. Stillconsidering the plasmonic couplings between the same twometa-atoms, in this TM case, the EM fields of the tworesonance modes strongly overlap with each other, leadingto a much stronger coupling coefficient. It is the differencein plasmonic couplings along the different directions thatgenerates the distinct angular dispersions for the twopolarizations, which eventually offers the device very richpolarization-control capabilities for input waves comingfrom different angles.

V. CONCLUSIONS

To summarize, we establish in this paper a theoreticalframework to study the angular dispersions in periodicmetasurfaces, and we validate the theory with terahertzexperiments on a metasurface exhibiting opposing angulardispersions for the two polarizations. Our analyses revealthe important role of plasmonic near-field coupling indictating the angular dispersions in metasurfaces, whichcan be utilized as an additional degree of freedom to designmultifunctional metadevices. As an illustration, we design amultifunctional terahertz polarization controller, whichcan realize distinct polarization-manipulation functional-ities at different incident angles. Our findings significantlyexpand the capabilities of the metasurface in manipulatingEM waves and can stimulate high-performance multifunc-tional metadevices for practical applications. Extending theconcept to designing inhomogeneous gradient metasurfa-ces with impinging-angle-dependent multifunctionalitieswould be of interest for future projects, particularly at highfrequencies (e.g., infrared and optical frequencies).

ACKNOWLEDGMENTS

This work was supported by National Key Researchand Development Program of China (GrantsNo. 2017YFA0303504 and No. 2017YFA0700201), theNational Natural Science Foundation of China (GrantsNo. 11734007, No. 11474057, and No. 11674068),and the Natural Science Foundation of Shanghai(Grants No. 16ZR1445200, No. 16JC1403100, andNo. 18ZR1403400). Part of experimental works wascarried out in Fudan Nanofabrication Laboratory.

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