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Hewlett Packard Labs Advanced Packaging for Silicon Photonic Interconnects M. Ashkan Seyedi Large-Scale Integrated Photonics Hewlett Packard Labs, Palo Alto, CA [email protected]

Advanced Packaging for Silicon Photonic Interconnects · HPE’s VLSI photonic interconnect technologies 3 Integrated hybrid laser engines ... Chip -on wafer attach of E die with

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Hewlett PackardLabs

Advanced Packaging for Silicon Photonic Interconnects

M. Ashkan SeyediLarge-Scale Integrated PhotonicsHewlett Packard Labs, Palo Alto, CA

[email protected]

HPE’s World-Class Photonics TeamDirector: Ray Beausoleil, SVP & Senior Fellow

HPE Confidential 2

• All members with PhD in photonics, physics, EE, or related fields

• Over 300 years of combined experience

• Over 2000 publications in top-tier journals like Nature, Phys. Rev Letters., etc.

• 10+ years of dominance in field of

• optics • quantum optics • photonics• optical computing

• Over $90M of funding

• World Records:• Highest Gain-Bandwidth APD (350GHz) for in-plane device

• Zhihong Huang• Quantum Dot-based Ring Lasers

• Di Liang, Geza Kurczveil• Quantum Dot on Si comb lasers

• Geza Kurczveil, Di Liang• Quantum Dot APD w/240GHz gain bandwidth, 10pA dark

current• Bassem Tossun, Geza Kurczveil, Di Liang

• InGaAs PiN PD w/32GHz bandwidth, 10nA dark current• Geza Kurczveil, Di Liang

• Attojoule Optical Switch• Ranojoy Bose

• 25Gb/s NRZ modulation on injection-ring with 2.5um radius• Ashkan Seyedi, et al.

• Integrated Tx/Rx ASIC for DWDM• Jim Huang, Peter Rhim, et al.

HPE’s VLSI photonic interconnect technologies

3

Integrated hybrid laser engines

DWDM photonic

I/O

HyperX

SiGe APDSilicon PIC

Multi-λ

light source

Optical

fiber

CMOS

DriverTuning

circuitry

Waveguide

Microring

Tx module

Optical coupler

CMOS

Receiver

PD

Rx module

External laser engine Hybrid PD

The Machine PathForward

350+ patents150+ publications100+ invited talks

Outline

• Motivation• Cost reduction

• Bandwidth density

• Design flexibility

• Testing KGD's

• Approaches• When to TSV?

• Fiber attach

• CWDM: the thorn in our sides

• HPE's work• Flip-chip E & P Die

• Socket Fiber attach

• Future vision

Value Proposition of Co-Packaged Photonics vs. today’s market solutions

5

Tech. Type Bandwidth Reach Form Factor $/Gb/s Gb/s/mm2 pJ/bit

Cu DAC 100G <3m QSFP $1 0.65 50

VCSEL AOC 100G <50m QSFP $1-2 0.65 50

VCSEL AOC 100G <100m QSFP <$10 0.65 50

SiPh AOC 100G 2km+ QSFP $10+ 0.65 50

Photonics Cost Comparison

More than 10x improvement need to meet demand!

HPC Example:• An ExaFLOP system (1000 PetaFLOPS) will have well over 100,000 links• At 50 pJ/bit, this is 1e6 links X 5e-11 Joule/bit X 1e11 bit/link = 5 MegaWatts! • Running for one year: 44 TWh, or 18,000 tons of coal! To Solve the problem: • Reduce from 50 5pJ/bit (10x reduction)• Increase per-link B/W from 100G 1000G (10x improvement)• Increasing link reach can reduce the required number in a system (3x decrease)• Afforded a 300x reduction!! 5 MegaWatts becomes 16kW…much more friendly

6/26/2019

HPE Confidential

Ok…but how?– Power

– Pluggable vs. Mid-Board vs. 3D Stack: my thoughts

– Why PAM? Because NRZ @ 56G is very hard

– Spoiler: NRZ @ 100G is even more hard (poor grammar on purpose)

– Solution: 3D stack with many parallel links at lower data rate for higher per-fiber data rate

– With 32 wavelengths, easily achieve 800G/fiber!

6

https://www.intel.com/content/dam/www/programmable/us/en/pdfs/literature/an/an835.pdf

What else?

– Footprint of QSFP

– Volume: 8.5mm X 18.35mm X 72.4mm = 11.3e3 mm3

– Surface: 156mm2

– Power Density of QSFP

– Rated to handle up to 20W (for 400G prototypes)

– So it has…

– 400Gbps/11.3e3 mm3 = 0.035 Gbps/mm3 or 2.5 Gbps/mm2 for surf.

– 50 pJ/bit & 0.13 W/mm2

– Fun Fact: solar energy = 1.64e -8 W/mm2 – 7 orders of magnitude less!

– Presents unique thermal challenges

– Achieve Bandwidth density of ~15 Gbps/mm2

– Power consumption of ~3pJ/bit

– Interposer temperature: a few comments

7

HPE’s 800 Gb/s Tx / 800 Gb/s Rx DWDM LinkHPE SuperDome Flex System

6/26/2019

HPE Confidential

A few words about assembly & associated cost

– If part is expensive to build, add more capability (i.e. bandwidth)

– How to commit known good die to package?

8

Goal: an interconnect that costs less than $0.1/Gbps

6/26/2019

HPE Confidential

Desired Assembly Flow for Interposer w/Top-Down Coupler

– A few comments:

– This enables the ‘optical tile’ to be used in proposed MCM packaging scheme

– Can be scaled to larger interposer sizes!

– Pigtail vs. socket-based ferrule attach

9

1) FEOL/BEOL w/TSV middle 2) Chip-on-wafer attach of E-die with microbump (Cu pillar both die)

EIC

3) Over-mold with protection for optical I/O region

EIC

4) Wafer thinning, backside reveal, RDL, C4 bumps, etc.

EIC

@ Foundry

@ OSAT

5) Die Singulation, Attach to PCB

EIC

6) Fiber Socket attach

EIC

6/26/2019

HPE Confidential

Call to Action:Desired Assembly Flow for Edge-Coupling and TSVs

10

1) FEOL/BEOL w/TSV middle 2) Chip-on-wafer attach of E-die with microbump (Cu pillar both die)

EIC

3) Over-mold with open area left for V-Groove

EIC

4) Wafer thinning, backside reveal, RDL, C4 bumps, etc.

EIC

@ Foundry

@ OSAT?

5) Die Singulation, Attach to PCB

EIC

6) Creation of V-Grooves

EIC

7) Fiber Attach

EIC

The magical step…

– A few other concerns:

– Aging of epoxy at fiber interface

– Physical handling of fiber for the tile during the rest of the assembly…

– Claim:

– If the CWDM standard didn’t exist (and I believe it shouldn’t), we would nevertalk about edge coupling

6/26/2019

HPE Confidential

HPE VCSEL Optical Module

• Module designed to be

– solder reflowable, socket-based, optically pluggable

• Thermal design for reliability

• Support x4, x8, x16 fibers

11

l1, l2, l3, l4

CWDM

filtersOptomechanical

Interface Assembly

Separate 1xN Bottom Emitting VCSEL

Arrays w/ integrated lens

Mux/DeMux

Relay Mirrors

l2 l4l1 l3

IC

C4 bumpsPCB

Turning Mirror

Ferrule Assembly

Enable Gen-Z ProtocolExample: The Machine Enclosure/Node

12

Flip-Chip CMOS/SiPh Interposer

13

• Highly Parallelizable Interconnect• Adding wavelengths per fiber does not

increase connector size

• Wavelength-routing enables dynamic

bandwidth allocation between end-points

• Dense 3D Packaging• Eases ASIC floorplan restrictions by

allowing I/O where the data is generated,

not at chip edge

• TSVs will remove need for wirebonds

• Hybridized Interconnect

architectures • Enable optimized product-dependent

solutions

• Various optical engine, modulator options

also enable compatibility w/external

vendor hardware

Courtesy of R. Lewington

Flip-Chip done by Olivier Castany at CEA Leti

HPE Confidential 14

Test Chip Specs- MZI modulator- 50G PAM4/wavelength- Compatible w/CWDM- 1x8 fiber array (pig tail)- ASIC flip-chip w/wirebonds- 2km+ reach- ~21 pJ/bit (including laser)

Merci!

[email protected]