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威騰新技股份有限公司 · PDF file威騰新技股份有限公司 Present by 邱家湧. Varian E500 Extraction Manipulator Overhaul

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  • Present by

    Varian E500 Extraction Manipulator OverhaulVarian E500 Extraction Manipulator Overhaul

  • Varian E500 Extraction Manipulator OverhaulVarian E500 Extraction Manipulator Overhaul

    Before After

  • 1. 1. Product InformationProduct Information

    2. 2. ((Parts Clean)Parts Clean)

    3. 3. Function TestFunction Test

    Contents

    Varian E500 Extraction Manipulator OverhaulVarian E500 Extraction Manipulator Overhaul

  • Product Information- ExtractionExtraction

    Extraction Manipulator ( Varian E500 series)

    8 Implanter Equipment (Varian P/N:E11037754 )

  • Product Information- ExtractionExtraction

    Extraction Manipulator ComponentsWhole Set

    Assembly

    Whole Set Disassembly

    Key-Parts

  • Warranty: 6 months, after installed assembly

    Delivery: 2 Weeks

    Ability: All Extraction ass`y

    Kits Replacement (by condition or test result)- manipulator bellows (

    ) / manipulator bellows (

    )

    - O-ring 1.984, 3ID, 4.734, 9.984, 0.676, 1-3/4 etc- Manip-rotary Arm- Ring,rtng,int.901hs- Motor Altered manipulator- Gear,Mod Y-AXS 72/45- slip clutcg mod 1.25- minipulator lead screw- Resistor 10K 10 turns

    (To see more for detail in Varian parts guide)

    Product Information- ExtractionExtraction

  • Product Information- ExtractionExtraction

    General Flow Chart

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    & 2.

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    3. &

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  • (Parts Clean)

    Roplat Overhaul Flow Chart Parts Clean

    Block DiagramBlock Diagram DescriptionDescription SpecificationSpecification

    Remove Electric Part- Motor, Resistor- Cable Disassemble all components

    Physical Cleaning

    Tightly controlled Procedure Safe and Clean Area

    H2O2 dip few minutes than Maintain constant water temperature (Hot Water) Use solvent

    DI Rinse(use Ultra sonic) DI Shower

    Bake Oven Air Blower

    Duration of purge is key(must purge for enough time) Metallic Parts Only

    Ensure no damage

    No residue No stains

    Remove all Moisture

  • (Parts Clean)

    Roplat Overhaul Flow Rebuild Produce

    Block DiagramBlock Diagram DescriptionDescription SpecificationSpecification

    Assembly 1

    Check all parts are correct type and have normal function

    Assemble mechanical parts

    Replace with Brand New PartsBrand New Parts for ifor i ssued componentsssued components

    Vacuum leak check

    X/Y/Z Axis Calibration

    Spread the grease evenly

    If parts function failed

    use new one

    Assemble Electrical components Rotation Motor & each Resistor Installation the remaining

    components

    Fill out Check List

    Packing

    Assembly 2

    Packing

    Confirm wire connection

    Smooth Rotation Use Test Device Leak Rate < 5.0e-8 mT/min

    Inspection Sheet

    Standard Packing

    Function Test

    Record

  • Leak Check

    Function Test Leak & Impedance Check

    Impedance Check1. Torque Strength of Motor > 2kg2. Coil Resistance < 10 3. Isolation Impedance >

    20M/250V

  • Function Test Offline Controller

    Control Panel AC 110VWin Chester

    Extraction On-line

    Control Panel 3Jig Calibration ToolExtraction Graph

    PM

  • Function Test X/Y/Z Calibration

    14=1 424

    25=2 546

    36=3 560

    1

    3

    2

    AXIS

    ()

  • Thank You !Thank You !

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