Англійсько-український словник з мікроелектроніки та мікросистемної техніки

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  • . ., . .-

    24 . , , , , , .

    , - ,, .

  • 3

    .

    . ,

    , () .

    , band edge edge.

    (~).

    (). chip ~-on-tape , .

    (|). check ,

    | , .

    . , floating gate (-).

    ,

    . , emitter-coupled (logic) gate .

    emitter-coupled logic gate; emitter-coupled gate constant

    (). , .

    , ,

    ([ ]). ion [ion-beam] milling

    . ion milling, ion-beam milling

    , multilayer metallization [] .

    ,

    .

    :

    , ,

    .

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    - 2 - . . - [] - III - . - - VMO V-

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    A

    abacus ( )ability:

    adhesive ~ ; resolving ~ , wetting ~ ,

    ablation:laser ~

    abradability abrasion:

    wafer ~

    abrasive , absorber (

    , )absorption ,

    band-to-band ~ characteristic ~ [] Compton ~ extrinsic ~ free-carrier ~ fundamental ~ []impurity ~ interband ~ intraband ~ intrinsic ~ []laser radiation ~ lattice ~ surface-state ~

    accelerator ( )floating-point ~ hardware ~

    acceptor , deep ~ shallow ~ ()

    accessibility and dissemination data

    ( )

    accessor/y:production ~ies vacuum ~ies []

    accumulation:charge ~

    accumulator ; product ~ ( )round-off ~ ( )

    accuracy alignment ~ instrument ~ positioning ~ repeatable ~ ; trimmed ~ () trimming ~ ()untrimmed ~ ()

    actigram ( )

    action 1. ; 2. () 3. ; avalanche ~ buffer ~ ( )compensating ~ continuous-wave ~ diode ~ parasitic ~ 1. 2. pulsed ~ punch-through ~ , pyrolytic ~ transistor ~ trigger ~

    activation , ; annealing ~ dopant [impurity] ~ [] light ~

    activity 1. ( ) 2.

    acuity:

    acu

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    edge ~ (. )adatom , additive 1. ; ; 2.

    dope ~

    add-on 1. pl () 2. adherence 1. ; 2.

    ( )die ~ ( )

    adhesion ; photoresist ~

    adhesive 1. , 2. electrically conductive ~

    emulsion ~ ~ filled ~ polymer ~ thixotropic ~ unfilled ~

    adhesiveness ; adion adjoint of a matrix ()

    adjustment ;

    functional ~ adlayer administration:

    ~ tests test pattern ~

    advice 1. 2. ()

    algorithm:A ~ A- ( , D-)aim ~ automatic placement and routing ~ backward error recovery ~ ( )best path ~ bit-map oriented spatial processing ~

    block-oriented ~ -branch and bound ~ ( )channel ~ D ~ D- ( )deductive ~ ( )discard ~ (. )exact embedding ~ ( )expansion ~ fast-Fourier-transform ~ graph-based ~ , , Gummels ~ hidden-line ~ ( )image processing ~ iterative ~ Lee ~ , min-cut ~ modified Lee ~ ( ), N-step ~ N- one-direction ~ pessimistic simulation ~ ( , ..)random-search ~ repair-most ~ Roths D ~ D- routing ~ Schonhage ~ ( )selective-trace ~ ( )

    alg

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    sequential ~ stable sorting ~ star ~ ( )table-driven ~ 9-value D- ~ D-wiring ~

    aliasing ( )

    aligner (); auto(mask)~ ( )contact ~ deep-UV projection ~ ALI [ -] diffusion tube ~ direct step-onto-wafer ~ ( )electron-beam ~ - full-field (mask) ~ () hard-contact ~ mask ~ (); projection ~ proximity ~ ()reduction projection ~ site ~ soft-contact ~ step-and-repeat [step-by-step, stepper] ~ shadow (projection) mask ~ ()

    submicron (mask) ~ ( ) wafer ~ wafer-stepping ~ X-ray ~

    alignment ; coarse ~ ; die-by-die ~ diffraction grating ~ double-diffraction ~ epitaxial ~ fine ~ ; Fresnel-zone ~ full-wafer [global wafer] ~ laser interferometric ~ laser scanning ~ level-to-level ~ , mask-to-wafer ~ multiple-mask ~ off-is ~ projection (mask) ~ proximity (mask) ~ () reticle ~ ; site-by-site ~ ( )spaced ~ ()target ~ theta ~

    allocation:connections ~ ()

    all

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    allocator:control ~ data/memory ~

    alloy | mercury-cadmium-telluride , III-V ~ V

    alloying:interface ~

    alpha 1. ( 2. -

    alumina , l23glazed ~

    aluminizing aluminum , l

    glass-coated ~

    ambient:annealing ~ dry oxygen ~ oxidizing ~ ; reducing ~ ;

    amorphization ( )

    amplification 1. 2. small-signal ~ 1. 2.

    amplifier antilog(arithmic) ~ bi-FET ~ bulk-effect ~ charge-transfer ~ Darlington ~ differential ~ drift-stabilized operational ~

    high-output current operational ~ high-stew rate operational ~ high-speed operational ~ high-voltage operational ~ hybrid ~ , IC ~ , logarithmic ~ low-drift operational ~ mixed-process ~ , monolithic ~ ; off-chip ~ [] one-chip ~ on-chip ~ operational ~ optical isolation ~ optically-coupled ~ sample-and-hold ~ semiconductor ~ S/H ~ . sample-and-hold amplifiersmall-signal ~ thick-film ~ thin-film ~

    analysis ~ synthesis ~ variance block-level ~ charged particle tivation ~ circuit ~ 1. 2. computer circuit ~

    ana

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    design ~ 1. 2. , EAPFS ~ effect-cause ~ -electron microprobe ~ failure (-mode) ~ ; gate-level ~ hazard ~ incremental circuit ~ liquid-crystal failure ~ means/ends ~ ( )mixed-level ~ mixed-mode ~ modified mesh ~ () modified nodal ~ multilevel ~ neutron tivation ~ nuclear reactions ~ on-line circuit ~ post-fault ~ race ~ ( )reject ~ residual gas ~ signature ~ sparse tableau ~ spike ~ ( )static timing ~ steady-state ~ surface elemental ~ ()

    thermogravimetric ~ (. )timing ~ ( )transient ~ what-if ~ -worst-case ~ X-photoemission spectroscopy ~

    analyzer (1. 2. )basic ~ logic ~ , multichannel ~ optical ~ path ~ , ( )semiconductor impurity ~ spreadsheet ~ ( )

    AND:dot [implied, wired] ~

    angle:sidewall ~ 1. () 2. () 3. (. )

    anhydride:boric ~ , , 23phosphoric ~ , , 25phosphorous ~ , , P2O3

    anisotropy etching ~

    anneal | high-temperature ~

    annealer electron-beam ~ -

    annealing bulk ~ capless ~ capping ~ contact ~ ( )

    ann

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    diffusion ~ hydrogen ~ implant(ation)~ ion-beam ~ - lamp ~ laser(-beam)~ light ~ microwave ~ -plasma ~ , pulse ~ rapid ~ superficial ~ thermal ~ [] ,

    anodization electrolytic ~ plasma ~

    antifuse (, )

    antimonide ( )aluminum ~ , AlSbgallium ~ , GaSbindium ~ , InSb

    antistat anodization (

    )

    apparatus ; cluster ion-beam ~ () double-crucible crystal-growing ~ float-zone ~ vapor-growth ~

    apparel:clean-room ~ ()

    applicator:glue ~ ()

    approach ; (. method,mode, technique)

    basic ~ - bipolar ~ () bottom-up ~ Bristle Blocks ~ building-block ~ cassette-to-cassette ~ cellular ~ cermet ~ chip-and-wire ~ circuit motivated ~ -custom [customized] ~ () divide and conquer ~ , ( )edge-based ~ ( )epic ~ -, -figure-based ~ ( )fixed-interconnection pattern ~ flat ~ () ( )flip-chip ~ gate-array ~ , hierarchical ~ hierarchical nesting ~ hundred r nt yield ~ 100%- hybrid ~ incremental ~ in-line ~ (. )

    app

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    iterative-ll ~ , Macrocell ~ master MOS ~ -master-slice ~ mesa-epitaxial fabrication ~ modular ~ monolithic ~ () path-oriented ~ , ( )planar (processing) ~ polycell (layout) ~ () (. )sea gates ~ () selective field-ide ~ shaped-beam ~ SOS ~ -standard ll(-based)~ structured ~ top-down ~ twin-tub ~ ( )two-polysilicon ~ waveform ~

    approval:design ~ specification ~

    approximation:FB [flat-band] ~ linear piecewise ~ - ( )

    architecture 1. ; ; 2. bit-slice ~

    channelless ~ ( )fault-tolerant ~

    area 1. , ; (. region, zone) 2. base ~ 1. , 2. bond (ing) ~ chip-mount(ing) ~ clean ~ , , collector ~ 1. , 2. connector ~ contact ~ 1. 2. diffused ~ drain ~ 1. , ( ) 2. dust-controlled ~ () edge-contact ~ emitter ~ 1. , 2. ion-damaged ~ , land ~ masked ~ ; metallized ~ ide-free ~ placement ~ , plate loading ~ possible trouble ~ raised-contact ~ , raised-metallized ~ ; , routable ~ , safe operating ~ ( )

    are

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    shaded ~ mask source ~ 1. () 2. stage working ~ terminal ~ wiring ~ ,

    arm:SMIF ~ ( ) transfer ~ ,

    arrangement 1. ; 2. 3. basic-circuit ~ diode ~ 1. 2. ; gate ~ 1. 2. ()heat-sinking ~ matrix ~ mounting ~ -ordered ~ stacked ~

    array 1. ; 2. 3. 4. 5. bipolar ~ bulk CMOS ~ 1. 2. - cell ~ 1. (. ) 2. , [] channel-free [channelless] gate ~ charge-coupled(-device)~ circuit ~ 1. 2. coupled quantum box ~ customizable ~ data ~ diode ~ with self-scanning

    drop-in test ~ FET ~ 1. 2. field-programmable gate ~ , fuse-link [fuse-programmable] gate ~ , [] C ~ ; image ~ 1. () 2. large-scale ~ ; laser-scanning ~ , lateral ~ linear ~ ( ); logic ~ [] , ; Macrocell ~ ( )mask-programmable ~ 1. , 2. , master slice ~ 1. 2. , master-slice gate [master-slice logic] ~ , [] memory ~ 1. 2. mesa p-n diode ~ microcell ~ monolithic ~ ; multichip ~ multistrip ~ n-channel [negative] MOS ~ 1. n--; n- 2. n- -

    arr

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    nonoverlapping redundant ~ , original image data ~ original subimage data ~ pattern ~ ()p-channel MOS ~ 1. - -; - 2. --pin-grid ~ 1. 2.